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Method for producing modified aluminum nitride starting material, modified aluminum nitride starting material, method for producing aluminum nitride crystals, and method for suppressing collapse
The purpose of the present invention is to provide a modified AlN raw material for suppressing collapse. The method for producing a modified aluminum nitride raw material includes a heat treatment step of heat-treating an aluminum nitride raw material to produce an aluminum nitride sintered body.
本发明的目的是提供一种抑制塌陷的改性AlN原料。改性氮化铝原料的制造方法包括对氮化铝原料进行加热处理并生成氮化铝烧结体的加热处理步骤。
Method for producing modified aluminum nitride starting material, modified aluminum nitride starting material, method for producing aluminum nitride crystals, and method for suppressing collapse
The purpose of the present invention is to provide a modified AlN raw material for suppressing collapse. The method for producing a modified aluminum nitride raw material includes a heat treatment step of heat-treating an aluminum nitride raw material to produce an aluminum nitride sintered body.
本发明的目的是提供一种抑制塌陷的改性AlN原料。改性氮化铝原料的制造方法包括对氮化铝原料进行加热处理并生成氮化铝烧结体的加热处理步骤。
Method for producing modified aluminum nitride starting material, modified aluminum nitride starting material, method for producing aluminum nitride crystals, and method for suppressing collapse
改性氮化铝原料的制造方法、改性氮化铝原料、氮化铝晶体的制造方法、塌陷抑制方法
KANEKO TADAAKI (author) / DOJIMA DAICHI (author) / MATSUBARA MOEKO (author) / NISHIO YOSHITAKA (author)
2022-11-25
Patent
Electronic Resource
Chinese
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