MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD: Fid-Bau Portal

MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD

KANEKO TADAAKI / DOJIMA DAICHI / MATSUBARA MOEKO / NISHIO YOSHITAKA

Abstract

The purpose of the present is to provide a modified AlN source for suppressing downfall defects. This manufacturing method of a modified aluminum nitride source involves a heat treatment step for heat treating an aluminum nitride source and generating an aluminum nitride sintered body.

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MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD

KANEKO TADAAKI / DOJIMA DAICHI / MATSUBARA MOEKO / NISHIO YOSHITAKA

Abstract

MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD

KANEKO TADAAKI / DOJIMA DAICHI / MATSUBARA MOEKO / NISHIO YOSHITAKA

Abstract

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Title:

MANUFACTURING METHOD OF MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MODIFIED ALUMINUM NITRIDE RAW MATERIAL, MANUFACTURING METHOD OF ALUMINUM NITRIDE CRYSTALS, AND DOWNFALL DEFECT PREVENTION METHOD

Additional title:

HERSTELLUNGSVERFAHREN FÜR MODIFIZIERTES ALUMINIUMNITRIDROHMATERIAL, MODIFIZIERTES ALUMINIUMNITRIDROHMATERIAL, HERSTELLUNGSVERFAHREN FÜR ALUMINIUMNITRIDKRISTALLE UND FALLFEHLERVERHINDERUNGSVERFAHREN
PROCÉDÉ DE FABRICATION DE MATIÈRE PREMIÈRE DE NITRURE D'ALUMINIUM MODIFIÉ, MATIÈRE PREMIÈRE DE NITRURE D'ALUMINIUM MODIFIÉ, PROCÉDÉ DE FABRICATION DE CRISTAUX DE NITRURE D'ALUMINIUM ET PROCÉDÉ DE PRÉVENTION DE DÉFAUT D'AFFAISSEMENT

Contributors:

KANEKO TADAAKI (author) / DOJIMA DAICHI (author) / MATSUBARA MOEKO (author) / NISHIO YOSHITAKA (author)

Publication date:

2024-05-22

Type of media:

Patent

Type of material:

Electronic Resource

Language:

English

Classification:

IPC: C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen / C04B Kalk , LIME