A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Pretreatment method of ceramic base material and method for coating film on ceramic base material
The invention belongs to the technical field of vacuum coating sputtering, and particularly relates to a pretreatment method of a ceramic base material and a method for coating the ceramic base material. According to the method, firstly, a ceramic base material is placed in an alkaline cleaning solution to be subjected to ultrasonic cleaning so as to remove organic pollutants, protective film layers and the like on the surface of the ceramic and in holes, and laser slag remaining in the through-hole ceramic holes after laser drilling can be removed through ultrasonic cleaning; then residual grease, organic pollutants and alkaline cleaning liquid on the surface of the ceramic are further removed through calcination, nitrogen introduced in the calcination process can serve as protective gas in the calcination process to protect the nitrogen ceramic from reacting with oxygen at the high temperature and can also serve as airflow gas to take away slag in through-hole ceramic holes, and the high-temperature bubbling phenomenon is avoided; and finally, fine dust on the surface of the ceramic is cleaned through argon dry etching, molecules on the surface of the ceramic are activated, and the binding force between the ceramic base material and the metal film layer is improved.
本发明属于真空镀膜溅射技术领域，具体涉及一种陶瓷基材的前处理方法和对陶瓷基材进行镀膜的方法。本发明首先将陶瓷基材置于碱性清洗液中进行超声清洗，以去除陶瓷表面以及孔内的有机污染物、保护膜层等，超声清洗可以去除激光打孔后残留在通孔陶瓷孔内的激光熔渣，再通过煅烧进一步去除陶瓷表面残留的油脂、有机污染物和碱性清洗液，煅烧过程中通入的氮气可以作为煅烧过程的保护气，保护氮陶瓷在高温下不与氧气反应，还可以作为气流气体，带走通孔陶瓷孔内的熔渣，避免高温鼓泡现象；最后通过氩气干法刻蚀清洗陶瓷表面的细微粉尘并活化陶瓷表面分子，提高陶瓷基材与金属膜层之间的结合力。
Pretreatment method of ceramic base material and method for coating film on ceramic base material
The invention belongs to the technical field of vacuum coating sputtering, and particularly relates to a pretreatment method of a ceramic base material and a method for coating the ceramic base material. According to the method, firstly, a ceramic base material is placed in an alkaline cleaning solution to be subjected to ultrasonic cleaning so as to remove organic pollutants, protective film layers and the like on the surface of the ceramic and in holes, and laser slag remaining in the through-hole ceramic holes after laser drilling can be removed through ultrasonic cleaning; then residual grease, organic pollutants and alkaline cleaning liquid on the surface of the ceramic are further removed through calcination, nitrogen introduced in the calcination process can serve as protective gas in the calcination process to protect the nitrogen ceramic from reacting with oxygen at the high temperature and can also serve as airflow gas to take away slag in through-hole ceramic holes, and the high-temperature bubbling phenomenon is avoided; and finally, fine dust on the surface of the ceramic is cleaned through argon dry etching, molecules on the surface of the ceramic are activated, and the binding force between the ceramic base material and the metal film layer is improved.
本发明属于真空镀膜溅射技术领域，具体涉及一种陶瓷基材的前处理方法和对陶瓷基材进行镀膜的方法。本发明首先将陶瓷基材置于碱性清洗液中进行超声清洗，以去除陶瓷表面以及孔内的有机污染物、保护膜层等，超声清洗可以去除激光打孔后残留在通孔陶瓷孔内的激光熔渣，再通过煅烧进一步去除陶瓷表面残留的油脂、有机污染物和碱性清洗液，煅烧过程中通入的氮气可以作为煅烧过程的保护气，保护氮陶瓷在高温下不与氧气反应，还可以作为气流气体，带走通孔陶瓷孔内的熔渣，避免高温鼓泡现象；最后通过氩气干法刻蚀清洗陶瓷表面的细微粉尘并活化陶瓷表面分子，提高陶瓷基材与金属膜层之间的结合力。
Pretreatment method of ceramic base material and method for coating film on ceramic base material
一种陶瓷基材的前处理方法和对陶瓷基材进行镀膜的方法
LAI HUIXIN (author) / WU JIANWEN (author) / ZHUANG TONG (author) / LIU FUKUO (author)
2023-03-21
Patent
Electronic Resource
Chinese
MOLDING METHOD OF CERAMIC BASE COMPOSITE MATERIAL AND CERAMIC BASE COMPOSITE MATERIAL
| European Patent Office | 2022
METHOD FOR FILLING OPEN PORE OF CERAMIC BASE COMPOSITE MATERIAL, AND CERAMIC BASE COMPOSITE MATERIAL
| European Patent Office | 2022
Study of Double-Base Thick Film Ceramic Material
| British Library Online Contents | 2002
NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL
| European Patent Office | 2023