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NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL
First, a scribe line (110) is formed on a first surface (102) of a nitride ceramic base material (100) by a laser. Next, the nitride ceramic base material (100) is divided along the scribe line (110) . The scribe line (110) includes a plurality of recessed portions (112). The plurality of recessed portions (112) are formed in a row on the first surface (102) of the nitride ceramic base material (100). A depth (d) of each of the plurality of recessed portions (112) is equal to or greater than 0.70 times and equal to or smaller than 1.10 times an opening width (w) of each of the plurality of recessed portions (112). The opening width (w) of each of the plurality of recessed portions (112) is equal to or greater than 1.00 times and equal to or smaller than 1.10 times an inter-center distance (p) of the plurality of recessed portions (112).
NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL
First, a scribe line (110) is formed on a first surface (102) of a nitride ceramic base material (100) by a laser. Next, the nitride ceramic base material (100) is divided along the scribe line (110) . The scribe line (110) includes a plurality of recessed portions (112). The plurality of recessed portions (112) are formed in a row on the first surface (102) of the nitride ceramic base material (100). A depth (d) of each of the plurality of recessed portions (112) is equal to or greater than 0.70 times and equal to or smaller than 1.10 times an opening width (w) of each of the plurality of recessed portions (112). The opening width (w) of each of the plurality of recessed portions (112) is equal to or greater than 1.00 times and equal to or smaller than 1.10 times an inter-center distance (p) of the plurality of recessed portions (112).
NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL
VERFAHREN ZUR HERSTELLUNG EINES NITRIDKERAMIKSUBSTRATS UND NITRIDKERAMIKBASISMATERIAL
PROCÉDÉ DE PRODUCTION D'UN SUBSTRAT EN CÉRAMIQUE DE NITRURE ET MATÉRIAU DE BASE EN CÉRAMIQUE DE NITRURE
YUASA AKIMASA (author) / ESHIMA YOSHIYUKI (author) / FUJIYOSHI DAIKI (author) / KOBASHI SEIJI (author) / NISHIMURA KOJI (author)
2023-08-23
Patent
Electronic Resource
English
NITRIDE CERAMIC SUBSTRATE PRODUCTION METHOD AND NITRIDE CERAMIC BASE MATERIAL
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