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A platform for research: civil engineering, architecture and urbanism
Wafer conveying box and wafer loading device
The invention discloses a wafer conveying box and a wafer loading device, the wafer conveying box comprises a box body and a sealing door in sealing connection with the box body, the sealing door is fixed with the box body through a door lock assembly, the side surface of the box body is provided with an opening, the side surface where the opening is located is a positioning surface, and a part of a wafer extends out of the box body from the opening. The sealing door is arranged at the opening of the box body and can move up and down along the box body, the sealing door is provided with a pair of mapping sensors capable of synchronously ascending and descending with the sealing door, and the pair of mapping sensors are located on the two sides of the opening and used for detecting the part of the wafer extending out of the box body. The door lock assembly comprises at least one lock groove and a lock disc which are correspondingly arranged, the lock groove is provided with a boss, the lock disc is rotationally connected with the sealing door, and the lock disc can be screwed with the lock groove when rotating under the action of a key. The wafer loading device integrates the functions of wafer storage and wafer detection, the sealing door can be conveniently and rapidly opened, and the wafer loading device is simplified.
本发明公开了一种晶圆传送盒和晶圆装载装置，其中晶圆传送盒包括盒体和与盒体密封连接的密封门，密封门通过门锁组件与盒体固定，其中盒体的侧面设置开口，开口所在的侧面为定位面，晶圆的部分从开口处延伸出盒体。密封门设置在盒体的开口处并能沿盒体上下移动，密封门上设置有能与其同步升降的一对映射传感器，一对映射传感器位于开口两侧，并对延伸出盒体的晶圆的部分进行检测。门锁组件包括至少一个对应设置的锁沟和锁盘，锁沟开设凸台上，锁盘与密封门转动连接，且锁盘在钥匙的作用下转动时，能与锁沟旋合。本发明集成了晶圆存放和晶圆检测的功能，便于快速打开密封门，简化了晶圆装载装置。
Wafer conveying box and wafer loading device
The invention discloses a wafer conveying box and a wafer loading device, the wafer conveying box comprises a box body and a sealing door in sealing connection with the box body, the sealing door is fixed with the box body through a door lock assembly, the side surface of the box body is provided with an opening, the side surface where the opening is located is a positioning surface, and a part of a wafer extends out of the box body from the opening. The sealing door is arranged at the opening of the box body and can move up and down along the box body, the sealing door is provided with a pair of mapping sensors capable of synchronously ascending and descending with the sealing door, and the pair of mapping sensors are located on the two sides of the opening and used for detecting the part of the wafer extending out of the box body. The door lock assembly comprises at least one lock groove and a lock disc which are correspondingly arranged, the lock groove is provided with a boss, the lock disc is rotationally connected with the sealing door, and the lock disc can be screwed with the lock groove when rotating under the action of a key. The wafer loading device integrates the functions of wafer storage and wafer detection, the sealing door can be conveniently and rapidly opened, and the wafer loading device is simplified.
本发明公开了一种晶圆传送盒和晶圆装载装置，其中晶圆传送盒包括盒体和与盒体密封连接的密封门，密封门通过门锁组件与盒体固定，其中盒体的侧面设置开口，开口所在的侧面为定位面，晶圆的部分从开口处延伸出盒体。密封门设置在盒体的开口处并能沿盒体上下移动，密封门上设置有能与其同步升降的一对映射传感器，一对映射传感器位于开口两侧，并对延伸出盒体的晶圆的部分进行检测。门锁组件包括至少一个对应设置的锁沟和锁盘，锁沟开设凸台上，锁盘与密封门转动连接，且锁盘在钥匙的作用下转动时，能与锁沟旋合。本发明集成了晶圆存放和晶圆检测的功能，便于快速打开密封门，简化了晶圆装载装置。
Wafer conveying box and wafer loading device
一种晶圆传送盒和晶圆装载装置
YE YING (author) / BAO WEICHENG (author) / WANG XUCHEN (author) / ZHU JIAHUI (author) / GE JINGCHANG (author) / XUE ZENGHUI (author)
2023-04-18
Patent
Electronic Resource
Chinese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
E05B
LOCKS
,
Schlösser
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
A helping hand for wafer loading
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