A platform for research: civil engineering, architecture and urbanism
Through-wafer Via Etching Enabling Wafer Stacking
Through-wafer Via Etching Enabling Wafer Stacking
Through-wafer Via Etching Enabling Wafer Stacking
Chambers, A. A. (author) / Ashraf, H. (author) / Hopkins, J. (author) / Pink, J. R. (author)
ADVANCED PACKAGING ; 14 ; 16-20
2005-01-01
5 pages
Article (Journal)
English
DDC:
658.564
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Si DRIE for Through-wafer Fabrication: An Option for Device-stacking Applications
British Library Online Contents | 2006
|Plasma Etching for Backside Wafer Thinning of SiC
British Library Online Contents | 2007
|Stacking and sintering method based on PZT-5 type ceramic wafer
European Patent Office | 2022
|