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Ultrafast laser connection method for transparent ceramic and monocrystalline silicon
The invention discloses an ultrafast laser connection method for transparent ceramic and monocrystalline silicon, and belongs to the new technical field of ultrafast laser connection. Comprising the following steps: 1) pretreating transparent ceramic and monocrystalline silicon to be connected; 2) fixing and placing the transparent ceramic and the monocrystalline silicon to be connected; and 3) ultrafast laser micro-connection. By utilizing the characteristics of ultrashort pulse width, extremely high peak intensity, extremely small heat affected zone and the like of the ultrafast laser, the transparent ceramic and the monocrystalline silicon which are greatly different in physical and chemical properties are successfully connected together, and a high-precision and high-reliability micro-connection joint is obtained.
一种透明陶瓷和单晶硅的超快激光连接方法,属于超快激光连接新技术领域。包括以下步骤:1)待连接的透明陶瓷和单晶硅的预处理;2)待连接的透明陶瓷和单晶硅的固定与放置;3)超快激光微连接。本发明利用超快激光的超短脉宽、极高的峰值强度和极小的热影响区等特点,成功将物理化学性能差异大的透明陶瓷和单晶硅连接在一起,并获得高精密、高可靠的微连接接头。
Ultrafast laser connection method for transparent ceramic and monocrystalline silicon
The invention discloses an ultrafast laser connection method for transparent ceramic and monocrystalline silicon, and belongs to the new technical field of ultrafast laser connection. Comprising the following steps: 1) pretreating transparent ceramic and monocrystalline silicon to be connected; 2) fixing and placing the transparent ceramic and the monocrystalline silicon to be connected; and 3) ultrafast laser micro-connection. By utilizing the characteristics of ultrashort pulse width, extremely high peak intensity, extremely small heat affected zone and the like of the ultrafast laser, the transparent ceramic and the monocrystalline silicon which are greatly different in physical and chemical properties are successfully connected together, and a high-precision and high-reliability micro-connection joint is obtained.
一种透明陶瓷和单晶硅的超快激光连接方法,属于超快激光连接新技术领域。包括以下步骤:1)待连接的透明陶瓷和单晶硅的预处理;2)待连接的透明陶瓷和单晶硅的固定与放置;3)超快激光微连接。本发明利用超快激光的超短脉宽、极高的峰值强度和极小的热影响区等特点,成功将物理化学性能差异大的透明陶瓷和单晶硅连接在一起,并获得高精密、高可靠的微连接接头。
Ultrafast laser connection method for transparent ceramic and monocrystalline silicon
一种透明陶瓷和单晶硅的超快激光连接方法
PAN RUI (author) / YANG DONG (author) / CHEN SHUJUN (author)
2023-05-02
Patent
Electronic Resource
Chinese
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