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Connection method of lead zirconate titanate ceramic and metal
The invention relates to a method for connecting lead zirconate titanate ceramic and metal. The connection method of the lead zirconate titanate ceramic and the metal comprises the following steps: (1) sequentially sputtering on the surface of the polarized PZT ceramic to prepare a metal simple substance layer, wherein the metal simple substance layer sequentially comprises a metal transition layer, a metal barrier layer and a metal welding layer; preferably, the metal transition layer is selected from at least one of a Ti layer, a Cr layer and an Al layer, the metal blocking layer is selected from at least one of a Ni layer, a Cu layer and a Co layer, and the metal welding layer is selected from at least one of an Au layer, a Cu layer, an Ag layer and a Pt layer. (2) coating the surface of the metalized PZT ceramic with a tin-based solder, and finally assembling the metalized PZT ceramic with the metal substrate so that the tin-based solder is in contact with the metal substrate; and (3) then loading into a reflow soldering furnace, carrying out low-temperature brazing, and naturally cooling to room temperature.
本发明涉及一种锆钛酸铅陶瓷与金属的连接方法。所述锆钛酸铅陶瓷与金属的连接方法包括:(1)在极化处理后的PZT陶瓷表面依次溅射制备金属单质层,所述金属单质层依次包括金属过渡层/金属阻隔层/金属焊接层;优选地,所述金属过渡层选自Ti层、Cr层、Al层中的至少一层,所述金属阻隔层选自Ni层、Cu层和Co层中的至少一层,所述金属焊接层选自Au层、Cu层、Ag层、Pt层中的至少一层;(2)将锡基焊料涂覆在已经金属化后的PZT陶瓷表面后,最后与金属基片组装使得锡基焊料与金属基片接触;(3)随后装入回流焊炉中,进行低温钎焊后,自然冷却至室温。
Connection method of lead zirconate titanate ceramic and metal
The invention relates to a method for connecting lead zirconate titanate ceramic and metal. The connection method of the lead zirconate titanate ceramic and the metal comprises the following steps: (1) sequentially sputtering on the surface of the polarized PZT ceramic to prepare a metal simple substance layer, wherein the metal simple substance layer sequentially comprises a metal transition layer, a metal barrier layer and a metal welding layer; preferably, the metal transition layer is selected from at least one of a Ti layer, a Cr layer and an Al layer, the metal blocking layer is selected from at least one of a Ni layer, a Cu layer and a Co layer, and the metal welding layer is selected from at least one of an Au layer, a Cu layer, an Ag layer and a Pt layer. (2) coating the surface of the metalized PZT ceramic with a tin-based solder, and finally assembling the metalized PZT ceramic with the metal substrate so that the tin-based solder is in contact with the metal substrate; and (3) then loading into a reflow soldering furnace, carrying out low-temperature brazing, and naturally cooling to room temperature.
本发明涉及一种锆钛酸铅陶瓷与金属的连接方法。所述锆钛酸铅陶瓷与金属的连接方法包括:(1)在极化处理后的PZT陶瓷表面依次溅射制备金属单质层,所述金属单质层依次包括金属过渡层/金属阻隔层/金属焊接层;优选地,所述金属过渡层选自Ti层、Cr层、Al层中的至少一层,所述金属阻隔层选自Ni层、Cu层和Co层中的至少一层,所述金属焊接层选自Au层、Cu层、Ag层、Pt层中的至少一层;(2)将锡基焊料涂覆在已经金属化后的PZT陶瓷表面后,最后与金属基片组装使得锡基焊料与金属基片接触;(3)随后装入回流焊炉中,进行低温钎焊后,自然冷却至室温。
Connection method of lead zirconate titanate ceramic and metal
一种锆钛酸铅陶瓷与金属的连接方法
LIU YAN (author) / ZHOU BO (author) / LIU XUEJIAN (author) / HUANG ZHENGREN (author)
2023-06-23
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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