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Composite perovskite target material and preparation method thereof, and preparation method of perovskite solar cell
The invention provides a composite perovskite target material and a preparation method thereof, and a preparation method of a perovskite solar cell. The composite perovskite target material comprises a first sub-target material and a second sub-target material, the first sub-target material and the second sub-target material both contain perovskite materials, and the perovskite materials in the first sub-target material and the second sub-target material are different; the composite perovskite target material is columnar, the side surface of the columnar composite perovskite target material comprises a first side surface and a second side surface located outside the first side surface, at least part of the first sub-target material is exposed out of the first side surface, and at least part of the second sub-target material is exposed out of the second side surface. Compared with a traditional solution method, the composite perovskite target material is a target material for sputtering, the perovskite thin film can be prepared through the sputtering method, the composite perovskite target material can be used for preparing the perovskite thin film containing various perovskite materials, and the uniformity of the perovskite thin film can be guaranteed while high preparation efficiency is achieved.
本公开提供了一种复合钙钛矿靶材及其制备方法、钙钛矿太阳电池的制备方法。该复合钙钛矿靶材包括：第一子靶材和第二子靶材，第一子靶材和第二子靶材均含有钙钛矿材料，且第一子靶材和第二子靶材中的钙钛矿材料不同；复合钙钛矿靶材呈柱状，柱状的复合钙钛矿靶材的侧表面包括第一侧表面以及位于第一侧表面之外的第二侧表面，至少部分第一子靶材露出于第一侧表面，至少部分第二子靶材露出于第二侧表面。相较于传统的溶液法，该复合钙钛矿靶材是一种溅射用的靶材，能够实现通过溅射法制备钙钛矿薄膜，该复合钙钛矿靶材能够用于制备含有多种钙钛矿材料的钙钛矿薄膜，并且在具有较高的制备效率同时，还能够保证钙钛矿薄膜的均匀性。
Composite perovskite target material and preparation method thereof, and preparation method of perovskite solar cell
The invention provides a composite perovskite target material and a preparation method thereof, and a preparation method of a perovskite solar cell. The composite perovskite target material comprises a first sub-target material and a second sub-target material, the first sub-target material and the second sub-target material both contain perovskite materials, and the perovskite materials in the first sub-target material and the second sub-target material are different; the composite perovskite target material is columnar, the side surface of the columnar composite perovskite target material comprises a first side surface and a second side surface located outside the first side surface, at least part of the first sub-target material is exposed out of the first side surface, and at least part of the second sub-target material is exposed out of the second side surface. Compared with a traditional solution method, the composite perovskite target material is a target material for sputtering, the perovskite thin film can be prepared through the sputtering method, the composite perovskite target material can be used for preparing the perovskite thin film containing various perovskite materials, and the uniformity of the perovskite thin film can be guaranteed while high preparation efficiency is achieved.
本公开提供了一种复合钙钛矿靶材及其制备方法、钙钛矿太阳电池的制备方法。该复合钙钛矿靶材包括：第一子靶材和第二子靶材，第一子靶材和第二子靶材均含有钙钛矿材料，且第一子靶材和第二子靶材中的钙钛矿材料不同；复合钙钛矿靶材呈柱状，柱状的复合钙钛矿靶材的侧表面包括第一侧表面以及位于第一侧表面之外的第二侧表面，至少部分第一子靶材露出于第一侧表面，至少部分第二子靶材露出于第二侧表面。相较于传统的溶液法，该复合钙钛矿靶材是一种溅射用的靶材，能够实现通过溅射法制备钙钛矿薄膜，该复合钙钛矿靶材能够用于制备含有多种钙钛矿材料的钙钛矿薄膜，并且在具有较高的制备效率同时，还能够保证钙钛矿薄膜的均匀性。
Composite perovskite target material and preparation method thereof, and preparation method of perovskite solar cell
复合钙钛矿靶材及其制备方法、钙钛矿太阳电池的制备方法
YI DIAN (author) / WANG RONGFU (author)
2023-07-28
Patent
Electronic Resource
Chinese
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