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Ultrahigh-temperature vacuum-resistant silicon nitride ceramic material and preparation method thereof
The invention provides an ultrahigh-temperature vacuum-resistant silicon nitride ceramic material and a preparation method thereof, and belongs to the technical field of silicon nitride ceramics. The ultrahigh-temperature vacuum-resistant silicon nitride ceramic material provided by the invention is prepared from the following raw materials in parts by mass: 80 to 95 parts of deoxidized silicon nitride, 3 to 15 parts of silicon carbide and 3 to 10 parts of sintering aid, the sintering aid comprises aluminum oxide, magnesium oxide and rare earth oxide. The result of the embodiment shows that the density of the ultrahigh-temperature vacuum-resistant silicon nitride ceramic material is greater than or equal to 99%, the Vickers hardness is greater than or equal to 18.5 GPa, the bending strength is greater than or equal to 800 MPa, the fracture toughness is greater than or equal to 6.5 MPa1/2, and the thermal conductivity is greater than or equal to 130 m.K.
本发明提供了一种超高温耐真空氮化硅陶瓷材料及其制备方法，属于氮化硅陶瓷技术领域。本发明提供的超高温耐真空氮化硅陶瓷材料，按质量份数计，包括以下原料：脱氧氮化硅80～95份，碳化硅3～15份，烧结助剂3～10份；所述烧结助剂包括氧化铝、氧化镁和稀土氧化物。实施例的结果显示，本发明提供的超高温耐真空氮化硅陶瓷材料的致密度≥99％，维氏硬度≥18.5GPa，抗弯强度≥800MPa，断裂韧性≥6.5MPa1/2，热导率≥130m·K。
Ultrahigh-temperature vacuum-resistant silicon nitride ceramic material and preparation method thereof
The invention provides an ultrahigh-temperature vacuum-resistant silicon nitride ceramic material and a preparation method thereof, and belongs to the technical field of silicon nitride ceramics. The ultrahigh-temperature vacuum-resistant silicon nitride ceramic material provided by the invention is prepared from the following raw materials in parts by mass: 80 to 95 parts of deoxidized silicon nitride, 3 to 15 parts of silicon carbide and 3 to 10 parts of sintering aid, the sintering aid comprises aluminum oxide, magnesium oxide and rare earth oxide. The result of the embodiment shows that the density of the ultrahigh-temperature vacuum-resistant silicon nitride ceramic material is greater than or equal to 99%, the Vickers hardness is greater than or equal to 18.5 GPa, the bending strength is greater than or equal to 800 MPa, the fracture toughness is greater than or equal to 6.5 MPa1/2, and the thermal conductivity is greater than or equal to 130 m.K.
本发明提供了一种超高温耐真空氮化硅陶瓷材料及其制备方法，属于氮化硅陶瓷技术领域。本发明提供的超高温耐真空氮化硅陶瓷材料，按质量份数计，包括以下原料：脱氧氮化硅80～95份，碳化硅3～15份，烧结助剂3～10份；所述烧结助剂包括氧化铝、氧化镁和稀土氧化物。实施例的结果显示，本发明提供的超高温耐真空氮化硅陶瓷材料的致密度≥99％，维氏硬度≥18.5GPa，抗弯强度≥800MPa，断裂韧性≥6.5MPa1/2，热导率≥130m·K。
Ultrahigh-temperature vacuum-resistant silicon nitride ceramic material and preparation method thereof
一种超高温耐真空氮化硅陶瓷材料及其制备方法
ZENG XIAOFENG (author) / XIAO LIANG (author) / ZHU FULIN (author) / QIAN LIHONG (author) / XU TAO (author)
2023-08-08
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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