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A platform for research: civil engineering, architecture and urbanism
Quartz crucible as well as preparation method and application thereof
The invention relates to the technical field of monocrystalline silicon manufacturing, in particular to a process for preparing monocrystalline silicon by a czochralski method. The quartz crucible provided by the invention comprises a quartz crucible body and a crucible additive coating, the crucible additive coating is completely or partially arranged on the inner surface of the body, and the crucible additive coating is basic magnesium carbonate and/or magnesium carbonate. The novel crucible additive is introduced and can be synthesized on the inner surface of the quartz crucible in the crystal pulling process, the high temperature resistance of the quartz crucible is remarkably improved, the quartz crucible is not prone to falling off, the crystal adding stability is guaranteed in the crystal pulling process, and the oxygen content can be reduced.
本发明涉及单晶硅制造技术领域，尤其涉及直拉法制备单晶硅的工艺。本发明提供的一种石英坩埚，包括石英坩埚本体和坩埚添加剂涂层，所述本体的内表面全部或部分设有坩埚添加剂涂层，所述坩埚添加剂涂层为碱式碳酸镁和/或碳酸镁。本发明通过引入一种新型的坩埚添加剂，能够在拉晶过程中反应合成在石英坩埚的内表面，显著提高石英坩埚的耐高温性能，且不易脱落，在拉晶过程中保证了加晶稳定性，还可以降低氧含量。
Quartz crucible as well as preparation method and application thereof
The invention relates to the technical field of monocrystalline silicon manufacturing, in particular to a process for preparing monocrystalline silicon by a czochralski method. The quartz crucible provided by the invention comprises a quartz crucible body and a crucible additive coating, the crucible additive coating is completely or partially arranged on the inner surface of the body, and the crucible additive coating is basic magnesium carbonate and/or magnesium carbonate. The novel crucible additive is introduced and can be synthesized on the inner surface of the quartz crucible in the crystal pulling process, the high temperature resistance of the quartz crucible is remarkably improved, the quartz crucible is not prone to falling off, the crystal adding stability is guaranteed in the crystal pulling process, and the oxygen content can be reduced.
本发明涉及单晶硅制造技术领域，尤其涉及直拉法制备单晶硅的工艺。本发明提供的一种石英坩埚，包括石英坩埚本体和坩埚添加剂涂层，所述本体的内表面全部或部分设有坩埚添加剂涂层，所述坩埚添加剂涂层为碱式碳酸镁和/或碳酸镁。本发明通过引入一种新型的坩埚添加剂，能够在拉晶过程中反应合成在石英坩埚的内表面，显著提高石英坩埚的耐高温性能，且不易脱落，在拉晶过程中保证了加晶稳定性，还可以降低氧含量。
Quartz crucible as well as preparation method and application thereof
石英坩埚及其制备方法与应用
LUO ZHONGWU (author) / WANG CHENGFANG (author)
2023-08-18
Patent
Electronic Resource
Chinese
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