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Die for forming optical element and manufacturing method of optical element
The invention discloses a mold for forming an optical element, the mold comprises a mold body and a composite coating, the mold body is made of silicon carbide ceramic, the composite coating comprises a high-entropy alloy layer, a molybdenum layer and a molybdenum disulfide layer, the high-entropy alloy layer is arranged on a forming surface, used for forming the optical element, of the mold body, and the molybdenum disulfide layer is arranged on the mold body. The molybdenum layer is arranged on the high-entropy alloy layer, the molybdenum disulfide layer is arranged on the molybdenum layer, the components of the high-entropy alloy layer are selected from at least five of Ti, Cr, Mo, W, Hf and Ta, and the components of the high-entropy alloy layer at least comprise Ti, Cr and Mo. According to the mold for forming the optical element, the composite coating system of a specific structure is arranged on the silicon carbide mold body, the binding force between the composite coating and the silicon carbide mold body is high, the release property between the composite coating and the optical element is good, the abrasion resistance is high, and the service life of the mold can reach 1450 times or above.
本发明公开了一种光学元件成型用的模具，包括模具本体和复合涂层，所述模具本体为碳化硅陶瓷，所述复合涂层包括高熵合金层、钼层和二硫化钼层，所述高熵合金层设置于所述模具本体用于成型光学元件的成型面上，所述钼层设置于所述高熵合金层上，所述二硫化钼层设置于所述钼层上，所述高熵合金层的成分选自Ti、Cr、Mo、W、Hf、Ta元素中的至少五种，所述高熵合金层的成分至少包含Ti、Cr和Mo元素。本发明的光学元件成型用的模具通过在碳化硅模具本体上设置特定结构的复合涂层体系，复合涂层与碳化硅模具本体的结合力高，与光学元件的离型性好，耐磨性高，模具的使用寿命能够达到1450次以上。
Die for forming optical element and manufacturing method of optical element
The invention discloses a mold for forming an optical element, the mold comprises a mold body and a composite coating, the mold body is made of silicon carbide ceramic, the composite coating comprises a high-entropy alloy layer, a molybdenum layer and a molybdenum disulfide layer, the high-entropy alloy layer is arranged on a forming surface, used for forming the optical element, of the mold body, and the molybdenum disulfide layer is arranged on the mold body. The molybdenum layer is arranged on the high-entropy alloy layer, the molybdenum disulfide layer is arranged on the molybdenum layer, the components of the high-entropy alloy layer are selected from at least five of Ti, Cr, Mo, W, Hf and Ta, and the components of the high-entropy alloy layer at least comprise Ti, Cr and Mo. According to the mold for forming the optical element, the composite coating system of a specific structure is arranged on the silicon carbide mold body, the binding force between the composite coating and the silicon carbide mold body is high, the release property between the composite coating and the optical element is good, the abrasion resistance is high, and the service life of the mold can reach 1450 times or above.
本发明公开了一种光学元件成型用的模具，包括模具本体和复合涂层，所述模具本体为碳化硅陶瓷，所述复合涂层包括高熵合金层、钼层和二硫化钼层，所述高熵合金层设置于所述模具本体用于成型光学元件的成型面上，所述钼层设置于所述高熵合金层上，所述二硫化钼层设置于所述钼层上，所述高熵合金层的成分选自Ti、Cr、Mo、W、Hf、Ta元素中的至少五种，所述高熵合金层的成分至少包含Ti、Cr和Mo元素。本发明的光学元件成型用的模具通过在碳化硅模具本体上设置特定结构的复合涂层体系，复合涂层与碳化硅模具本体的结合力高，与光学元件的离型性好，耐磨性高，模具的使用寿命能够达到1450次以上。
Die for forming optical element and manufacturing method of optical element
一种光学元件成型用的模具及光学元件制法
ZHAO XIN'AN (author) / WU ZHIHUA (author)
2023-10-03
Patent
Electronic Resource
Chinese
METHOD FOR MANUFACTURING OPTICAL ELEMENT AND OPTICAL ELEMENT
| European Patent Office | 2023
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