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A platform for research: civil engineering, architecture and urbanism
Zinc oxide target material and preparation method thereof
The invention relates to the technical field of target production, and discloses a preparation method of a zinc oxide target, which comprises the following steps: mixing small-particle zinc oxide with the particle size of 1-3 microns and large-particle zinc oxide with the particle size of 3-5 microns according to the mass ratio of (1.5-4): 1 to obtain a mixed zinc oxide material; carrying out vacuum hot pressing on the mixed zinc oxide material to obtain a hot-pressed blank; finally, the hot-pressed blank is sintered, and the zinc oxide target material is obtained.The zinc oxide target material prepared through the preparation method has high relative density, and meanwhile in the preparation process, by adjusting various parameters, we surprisingly find that when the parameters are specific values, the relative density is increased most obviously.
本发明涉及靶材生产技术领域，公开了一种氧化锌靶材的制备方法，该方法通过将粒径为1～3微米的小颗粒氧化锌与粒径为3～5微米的大颗粒氧化锌按1.5～4：1的质量比混合，得到混合后的氧化锌物料；再将混合后的氧化锌物料真空热压，得到热压毛坯；最后将热压毛坯烧结，得到氧化锌靶材，由该制备方法制得的氧化锌靶材，不仅具有较高的相对密度，同时在制备过程中，通过对各项参数的调整，我们惊喜地发现当各参数为一特定值时，对相对密度的提升最为明显。
Zinc oxide target material and preparation method thereof
The invention relates to the technical field of target production, and discloses a preparation method of a zinc oxide target, which comprises the following steps: mixing small-particle zinc oxide with the particle size of 1-3 microns and large-particle zinc oxide with the particle size of 3-5 microns according to the mass ratio of (1.5-4): 1 to obtain a mixed zinc oxide material; carrying out vacuum hot pressing on the mixed zinc oxide material to obtain a hot-pressed blank; finally, the hot-pressed blank is sintered, and the zinc oxide target material is obtained.The zinc oxide target material prepared through the preparation method has high relative density, and meanwhile in the preparation process, by adjusting various parameters, we surprisingly find that when the parameters are specific values, the relative density is increased most obviously.
本发明涉及靶材生产技术领域，公开了一种氧化锌靶材的制备方法，该方法通过将粒径为1～3微米的小颗粒氧化锌与粒径为3～5微米的大颗粒氧化锌按1.5～4：1的质量比混合，得到混合后的氧化锌物料；再将混合后的氧化锌物料真空热压，得到热压毛坯；最后将热压毛坯烧结，得到氧化锌靶材，由该制备方法制得的氧化锌靶材，不仅具有较高的相对密度，同时在制备过程中，通过对各项参数的调整，我们惊喜地发现当各参数为一特定值时，对相对密度的提升最为明显。
Zinc oxide target material and preparation method thereof
一种氧化锌靶材及其制备方法
YU FANG (author) / ZHU LIU (author) / TONG PEIYUN (author)
2023-11-14
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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