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A platform for research: civil engineering, architecture and urbanism
Gallium-doped zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a gallium-doped zinc oxide target material, which comprises the following steps: pulping gallium oxide, zinc oxide and the like, and carrying out grinding, spray granulation, acid dissolution grinding, drying molding, cold isostatic pressing, sintering and the like to obtain the gallium-doped zinc oxide target material with higher relative density. The preparation method is simple in process and easy to operate, and the prepared gallium-doped zinc oxide target material has a compact microstructure.
本发明属于靶材制备技术领域，公开了掺镓氧化锌靶材的制备方法，包括：将氧化镓、氧化锌等制浆，经研磨、喷雾造粒、酸溶研磨、干燥成型、冷等静压、烧结等步骤，获得相对密度较高的掺镓氧化锌靶材。本发明的制备方法工艺简单易操作，制备得到的掺镓氧化锌靶材具有致密的微观结构。
Gallium-doped zinc oxide target material and preparation method thereof
The invention belongs to the technical field of target material preparation, and discloses a preparation method of a gallium-doped zinc oxide target material, which comprises the following steps: pulping gallium oxide, zinc oxide and the like, and carrying out grinding, spray granulation, acid dissolution grinding, drying molding, cold isostatic pressing, sintering and the like to obtain the gallium-doped zinc oxide target material with higher relative density. The preparation method is simple in process and easy to operate, and the prepared gallium-doped zinc oxide target material has a compact microstructure.
本发明属于靶材制备技术领域，公开了掺镓氧化锌靶材的制备方法，包括：将氧化镓、氧化锌等制浆，经研磨、喷雾造粒、酸溶研磨、干燥成型、冷等静压、烧结等步骤，获得相对密度较高的掺镓氧化锌靶材。本发明的制备方法工艺简单易操作，制备得到的掺镓氧化锌靶材具有致密的微观结构。
Gallium-doped zinc oxide target material and preparation method thereof
掺镓氧化锌靶材及其制备方法
LIU CHENGLONG (author) / GU DESHENG (author) / LI KAIJIE (author) / WANG QIFENG (author) / ZHANG XINGYU (author)
2024-11-08
Patent
Electronic Resource
Chinese
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