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Boron nitride ceramic setter plate and preparation method thereof
Belonging to the technical field of ceramics, the invention discloses a boron nitride ceramic setter plate, which is prepared from the following raw materials by weight: 90-110 parts of boron nitride powder, 3-5 parts of nano rare earth oxide, 3-5 parts of a composite sintering aid, 1-3 parts of a dispersant, and 1-3 parts of a surfactant. The invention also discloses a preparation method of the boron nitride ceramic setter plate. The preparation method specifically comprises the following steps: (1) burdening; (2) ball milling; (3) cold isostatic pressing forming; and (4) hot pressed sintering. The boron nitride ceramic setter plate prepared by the invention has the advantages of high purity, high temperature resistance (safe and long-term use under vacuum at 1800 DEG C and safe and long-term use under inert atmosphere at 2100 DEG C), low thermal expansion coefficient, good thermal stability, strong thermal shock resistance (the plate is taken out and cooled to room temperature at 1000 DEG C and does not crack after circulation for 100 times), excellent thermal conductivity and high resistivity at normal temperature, and can be used for a long time. And burning objects (especially casting aluminum nitride ceramics and silicon nitride ceramics) can be uniformly heated and are uniform in color.
本发明公开了一种氮化硼陶瓷承烧板,属于陶瓷技术领域,包括以下重量份的原料:氮化硼粉体90‑110份、纳米稀土氧化物3‑5份、复合烧结助剂3‑5份、分散剂1‑3份和表面活性剂1‑3份。本发明还公开了一种氮化硼陶瓷承烧板的制备方法,具体包括以下步骤:(1)配料;(2)球磨;(3)冷等静压成型;(4)热压烧结。本发明制得的氮化硼陶瓷承烧板纯度高、耐温高(真空下1800℃可安全长期使用,惰性气氛下2100℃可安全长期使用)、热膨胀系数低、热稳定性好、抗热震性强(1000℃,取出冷却至室温,循环100次不开裂)、导热性优良、常温电阻率高,能够使载烧的物件(特别是流延氮化铝陶瓷和氮化硅陶瓷)受热均匀,颜色均匀。
Boron nitride ceramic setter plate and preparation method thereof
Belonging to the technical field of ceramics, the invention discloses a boron nitride ceramic setter plate, which is prepared from the following raw materials by weight: 90-110 parts of boron nitride powder, 3-5 parts of nano rare earth oxide, 3-5 parts of a composite sintering aid, 1-3 parts of a dispersant, and 1-3 parts of a surfactant. The invention also discloses a preparation method of the boron nitride ceramic setter plate. The preparation method specifically comprises the following steps: (1) burdening; (2) ball milling; (3) cold isostatic pressing forming; and (4) hot pressed sintering. The boron nitride ceramic setter plate prepared by the invention has the advantages of high purity, high temperature resistance (safe and long-term use under vacuum at 1800 DEG C and safe and long-term use under inert atmosphere at 2100 DEG C), low thermal expansion coefficient, good thermal stability, strong thermal shock resistance (the plate is taken out and cooled to room temperature at 1000 DEG C and does not crack after circulation for 100 times), excellent thermal conductivity and high resistivity at normal temperature, and can be used for a long time. And burning objects (especially casting aluminum nitride ceramics and silicon nitride ceramics) can be uniformly heated and are uniform in color.
本发明公开了一种氮化硼陶瓷承烧板,属于陶瓷技术领域,包括以下重量份的原料:氮化硼粉体90‑110份、纳米稀土氧化物3‑5份、复合烧结助剂3‑5份、分散剂1‑3份和表面活性剂1‑3份。本发明还公开了一种氮化硼陶瓷承烧板的制备方法,具体包括以下步骤:(1)配料;(2)球磨;(3)冷等静压成型;(4)热压烧结。本发明制得的氮化硼陶瓷承烧板纯度高、耐温高(真空下1800℃可安全长期使用,惰性气氛下2100℃可安全长期使用)、热膨胀系数低、热稳定性好、抗热震性强(1000℃,取出冷却至室温,循环100次不开裂)、导热性优良、常温电阻率高,能够使载烧的物件(特别是流延氮化铝陶瓷和氮化硅陶瓷)受热均匀,颜色均匀。
Boron nitride ceramic setter plate and preparation method thereof
一种氮化硼陶瓷承烧板及其制备方法
WANG QIAN (author) / GONG PENGCHENG (author) / ZHANG YONG (author) / REN WENJIE (author) / REN XUEMEI (author)
2023-12-01
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
/
F27D
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