A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Piston assembly, air cylinder and equipment for processing substrate
The present disclosure is directed to providing a piston assembly that does not leak particulates from a cylinder and, in an embodiment, comprises: a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particulate discharge flow path extending from an inner space of the piston body to an outer surface of the piston body.
本公开旨在提供微粒不从缸中泄漏出来的活塞组件，并且在实施方式中包括：活塞主体；活塞杆，连接到活塞主体；第一凹槽，形成在活塞主体的外表面中；以及微粒排出流动路径，从活塞主体的内部空间延伸到活塞主体的外表面。
Piston assembly, air cylinder and equipment for processing substrate
The present disclosure is directed to providing a piston assembly that does not leak particulates from a cylinder and, in an embodiment, comprises: a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particulate discharge flow path extending from an inner space of the piston body to an outer surface of the piston body.
本公开旨在提供微粒不从缸中泄漏出来的活塞组件，并且在实施方式中包括：活塞主体；活塞杆，连接到活塞主体；第一凹槽，形成在活塞主体的外表面中；以及微粒排出流动路径，从活塞主体的内部空间延伸到活塞主体的外表面。
Piston assembly, air cylinder and equipment for processing substrate
活塞组件、气缸及用于处理基板的设备
EOM SUNG-HOON (author) / HONG NAM-KI (author)
2023-12-08
Patent
Electronic Resource
Chinese
IPC:
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
F04B
Verdrängerkraft- und Verdrängerarbeitsmaschinen für Flüssigkeiten
,
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES