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High-performance silicon nitride sealing ring and preparation method thereof
The invention provides a high-performance silicon nitride sealing ring and a preparation method thereof, and relates to the technical field of sealing materials. The preparation method comprises the following steps: ball-milling and mixing powder (90-95% of silicon nitride, 0.5-1% of magnesium oxide, 0.5-1% of cerium oxide, 1-3% of chromic oxide and 3-8% of yttrium oxide) with a binder, a dispersant and water, and then spray-drying to obtain composite powder; mixing the composite powder with beta-Si3N4 seed crystal, and carrying out compression molding to obtain a green body; and carrying out segmented air pressure sintering on the green body in nitrogen to obtain the high-performance silicon nitride sealing ring. Experimental results of the embodiment show that the relative density of the high-performance silicon nitride sealing ring prepared by the preparation method provided by the invention can reach 99.99%, the hardness can reach HV1600, the bending strength can reach 852 MPa, and the fracture toughness can reach 7.36 MPa.m < 1/2 >.
本发明提供了一种高性能氮化硅密封环及其制备方法，涉及密封材料技术领域。本发明将如下质量百分比的粉料(氮化硅90～95％、氧化镁0.5～1％、氧化铈0.5～1％、氧化铬1～3％以及氧化钇3～8％)与粘结剂、分散剂和水进行球磨混合后喷雾干燥，得到复合粉体；将所述复合粉体与β‑Si3N4晶种混合后进行模压成型，得到坯体；将所述坯体在氮气中进行分段气压烧结，得到高性能氮化硅密封环。实施例的实验结果表明，本发明提供的制备方法制备得到的高性能氮化硅密封环的相对密度可达99.99％，硬度可达HV1600，弯曲强度可达852MPa，断裂韧性可达7.36MPa·m1/2。
High-performance silicon nitride sealing ring and preparation method thereof
The invention provides a high-performance silicon nitride sealing ring and a preparation method thereof, and relates to the technical field of sealing materials. The preparation method comprises the following steps: ball-milling and mixing powder (90-95% of silicon nitride, 0.5-1% of magnesium oxide, 0.5-1% of cerium oxide, 1-3% of chromic oxide and 3-8% of yttrium oxide) with a binder, a dispersant and water, and then spray-drying to obtain composite powder; mixing the composite powder with beta-Si3N4 seed crystal, and carrying out compression molding to obtain a green body; and carrying out segmented air pressure sintering on the green body in nitrogen to obtain the high-performance silicon nitride sealing ring. Experimental results of the embodiment show that the relative density of the high-performance silicon nitride sealing ring prepared by the preparation method provided by the invention can reach 99.99%, the hardness can reach HV1600, the bending strength can reach 852 MPa, and the fracture toughness can reach 7.36 MPa.m < 1/2 >.
本发明提供了一种高性能氮化硅密封环及其制备方法，涉及密封材料技术领域。本发明将如下质量百分比的粉料(氮化硅90～95％、氧化镁0.5～1％、氧化铈0.5～1％、氧化铬1～3％以及氧化钇3～8％)与粘结剂、分散剂和水进行球磨混合后喷雾干燥，得到复合粉体；将所述复合粉体与β‑Si3N4晶种混合后进行模压成型，得到坯体；将所述坯体在氮气中进行分段气压烧结，得到高性能氮化硅密封环。实施例的实验结果表明，本发明提供的制备方法制备得到的高性能氮化硅密封环的相对密度可达99.99％，硬度可达HV1600，弯曲强度可达852MPa，断裂韧性可达7.36MPa·m1/2。
High-performance silicon nitride sealing ring and preparation method thereof
一种高性能氮化硅密封环及其制备方法
XIAO LI (author) / ZHU FULIN (author) / XU TAO (author) / WEN JINTAO (author) / XIE SHANSUI (author)
2023-12-29
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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