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Preparation method of molybdenum tantalum oxide target material
The invention provides a molybdenum tantalum oxide target material preparation method, which comprises: uniformly mixing molybdenum trioxide powder and tantalum powder to obtain mixed powder, uniformly mixing a binder solution and the mixed powder to obtain a mixture, carrying out spray granulation on the mixture to obtain spheroidic molybdenum tantalum oxide powder, and drying the spheroidic molybdenum tantalum oxide powder to obtain the molybdenum tantalum oxide target material. And finally, cold pressing, hot pressing sintering and machining are conducted in sequence, and the molybdenum tantalum oxide target material is obtained. According to the preparation method disclosed by the invention, spray granulation is added before cold pressing, so that the spheroidal tantalum molybdenum oxide powder with uniform particles, good flowability and large apparent density can be prepared, the density of a cold-pressed blank is improved, the risk of cracking during hot pressing sintering caused by low density of the cold-pressed blank, more residual gas and non-uniform distribution of a binder is avoided, and the service life of the cold-pressed blank is prolonged. And the tantalum molybdenum oxide target material with high density can be prepared after subsequent cold pressing and hot pressing sintering.
本发明提供了一种氧化钼钽靶材的制备方法，所述制备方法将三氧化钼粉与钽粉混合均匀得到混合粉末，再将粘结剂溶液与所述混合粉末混合均匀得到混合料，然后将所述混合料进行喷雾造粒得到类球形氧化钼钽粉末，最后依次进行冷压、热压烧结、机械加工，得到氧化钼钽靶材。本发明所述制备方法在冷压之前增设了喷雾造粒，可以制得颗粒均匀、流动性好、松装密度大的类球形氧化钼钽粉末，提高了冷压坯料的致密度，避免了由于冷压坯料致密度不高，残留气体较多，粘结剂分布不均匀，导致热压烧结时开裂的风险，还可以保证后续通过冷压和热压烧结后，可以制得致密度高的氧化钼钽靶材。
Preparation method of molybdenum tantalum oxide target material
The invention provides a molybdenum tantalum oxide target material preparation method, which comprises: uniformly mixing molybdenum trioxide powder and tantalum powder to obtain mixed powder, uniformly mixing a binder solution and the mixed powder to obtain a mixture, carrying out spray granulation on the mixture to obtain spheroidic molybdenum tantalum oxide powder, and drying the spheroidic molybdenum tantalum oxide powder to obtain the molybdenum tantalum oxide target material. And finally, cold pressing, hot pressing sintering and machining are conducted in sequence, and the molybdenum tantalum oxide target material is obtained. According to the preparation method disclosed by the invention, spray granulation is added before cold pressing, so that the spheroidal tantalum molybdenum oxide powder with uniform particles, good flowability and large apparent density can be prepared, the density of a cold-pressed blank is improved, the risk of cracking during hot pressing sintering caused by low density of the cold-pressed blank, more residual gas and non-uniform distribution of a binder is avoided, and the service life of the cold-pressed blank is prolonged. And the tantalum molybdenum oxide target material with high density can be prepared after subsequent cold pressing and hot pressing sintering.
本发明提供了一种氧化钼钽靶材的制备方法，所述制备方法将三氧化钼粉与钽粉混合均匀得到混合粉末，再将粘结剂溶液与所述混合粉末混合均匀得到混合料，然后将所述混合料进行喷雾造粒得到类球形氧化钼钽粉末，最后依次进行冷压、热压烧结、机械加工，得到氧化钼钽靶材。本发明所述制备方法在冷压之前增设了喷雾造粒，可以制得颗粒均匀、流动性好、松装密度大的类球形氧化钼钽粉末，提高了冷压坯料的致密度，避免了由于冷压坯料致密度不高，残留气体较多，粘结剂分布不均匀，导致热压烧结时开裂的风险，还可以保证后续通过冷压和热压烧结后，可以制得致密度高的氧化钼钽靶材。
Preparation method of molybdenum tantalum oxide target material
一种氧化钼钽靶材的制备方法
YAO LIJUN (author) / PAN JIE (author) / HUANG JIEWEN (author) / WANG XUEZE (author) / WU DONGQING (author)
2024-01-02
Patent
Electronic Resource
Chinese
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