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Preparation method of molybdenum oxide target material
The invention belongs to a target material preparation method, and particularly discloses a molybdenum oxide target material preparation method, which comprises: (1) mixing MoO2, Mo4O11 and Mo9O26 according to a molar ratio of 1.4-1.7: 1: 0.4-0.8 to obtain mixed powder, carrying out ball milling on the mixed powder, a binder and ethanol, uniformly mixing, carrying out spray drying to obtain spherical powder, carrying out heat treatment, and screening to obtain mixed powder; (2) carrying out secondary oxygen supplementation on the mixed powder in a muffle furnace to obtain oxygen-supplemented mixed powder; (3) pressing the oxygenated mixed powder into a blank; (4) drying the blank, filling the blank into a sheath, vacuumizing and soldering, then carrying out hot isostatic pressing treatment, and removing the sheath to obtain a molybdenum oxide target material crude product; and (5) machining and cleaning the molybdenum oxide target material crude product to obtain the molybdenum oxide target material. The invention provides the molybdenum oxide target material with high purity and high density.
本发明属于靶材制备方法，具体公开一种氧化钼靶材的制备方法，包括以下步骤：（1）将摩尔比1.4‑1.7：1：0.4‑0.8的MoO2、Mo4O11和Mo9O26混合，得到混合粉末，将混合粉末、粘结剂和乙醇球磨混合均匀，喷雾干燥得到球形粉体，热处理后，过筛，得到混合粉体；（2）将混合粉体在马弗炉内进行二次补氧，得到补氧后的混合粉体；（3）将补氧后的混合粉体压制成坯料；（4）将坯料烘干后，装入包套中抽真空焊封，然后进行热等静压处理，除去包套后得到氧化钼靶材粗品；（5）将氧化钼靶材粗品进行机械加工和清洗，得到氧化钼靶材。本发明提供了一种高纯度、高密度的氧化钼靶材。
Preparation method of molybdenum oxide target material
The invention belongs to a target material preparation method, and particularly discloses a molybdenum oxide target material preparation method, which comprises: (1) mixing MoO2, Mo4O11 and Mo9O26 according to a molar ratio of 1.4-1.7: 1: 0.4-0.8 to obtain mixed powder, carrying out ball milling on the mixed powder, a binder and ethanol, uniformly mixing, carrying out spray drying to obtain spherical powder, carrying out heat treatment, and screening to obtain mixed powder; (2) carrying out secondary oxygen supplementation on the mixed powder in a muffle furnace to obtain oxygen-supplemented mixed powder; (3) pressing the oxygenated mixed powder into a blank; (4) drying the blank, filling the blank into a sheath, vacuumizing and soldering, then carrying out hot isostatic pressing treatment, and removing the sheath to obtain a molybdenum oxide target material crude product; and (5) machining and cleaning the molybdenum oxide target material crude product to obtain the molybdenum oxide target material. The invention provides the molybdenum oxide target material with high purity and high density.
本发明属于靶材制备方法，具体公开一种氧化钼靶材的制备方法，包括以下步骤：（1）将摩尔比1.4‑1.7：1：0.4‑0.8的MoO2、Mo4O11和Mo9O26混合，得到混合粉末，将混合粉末、粘结剂和乙醇球磨混合均匀，喷雾干燥得到球形粉体，热处理后，过筛，得到混合粉体；（2）将混合粉体在马弗炉内进行二次补氧，得到补氧后的混合粉体；（3）将补氧后的混合粉体压制成坯料；（4）将坯料烘干后，装入包套中抽真空焊封，然后进行热等静压处理，除去包套后得到氧化钼靶材粗品；（5）将氧化钼靶材粗品进行机械加工和清洗，得到氧化钼靶材。本发明提供了一种高纯度、高密度的氧化钼靶材。
Preparation method of molybdenum oxide target material
一种氧化钼靶材的制备方法
ZHOU ZHIHONG (author) / YANG YONGTIAN (author) / LIU QINGXIONG (author)
2024-08-16
Patent
Electronic Resource
Chinese
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