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Treatment method of guide cylinder
The invention discloses a treatment method of a guide cylinder. The treatment method comprises the following steps: a deposition step: placing the guide cylinder in hydrocarbon gas for deposition to form a pyrolytic carbon layer; a dipping step: dipping the guide cylinder with the pyrolytic carbon layer in the precursor liquid; a high-temperature treatment step: treating the dipped guide cylinder in a first atmosphere environment at a first temperature for 1-4 hours; the guide cylinder treated at the first temperature is placed in a second atmosphere environment to be treated at the second temperature for 5-30 min; the guide cylinder treated at the second temperature is placed in a third atmosphere environment to be treated at the third temperature for 1-4 h; the precursor liquid comprises polycarbosilane, SiC and a solvent; the first temperature is 120-200 DEG C, and the first atmosphere environment comprises an inert atmosphere or a vacuum environment; the second temperature is 800-1200 DEG C, and the second atmosphere environment comprises an oxidizing atmosphere; the third temperature is 1300-1500 DEG C, and the third atmosphere environment comprises an inert atmosphere or a vacuum environment. The surface of the guide cylinder treated by the method is not easy to oxidize and damage, and surface cracking and chipping are avoided.
本发明公开一种导流筒的处理方法,包括:沉积步骤:将导流筒置于碳氢化合物气体中沉积形成热解碳层;浸渍步骤:将具有热解碳层的导流筒置于前驱体液中浸渍;高温处理步骤:将浸渍后的导流筒置于第一气氛环境中在第一温度下处理1‑4h;将在第一温度下处理后的导流筒置于第二气氛环境中在第二温度下处理5‑30min;将在第二温度下处理后的导流筒置于第三气氛环境中在第三温度下处理1‑4h;前驱体液包括聚碳硅烷、SiC、溶剂;第一温度为120‑200℃,第一气氛环境包括惰性气氛或真空环境;第二温度为800‑1200℃,第二气氛环境包括氧化性气氛;第三温度为1300‑1500℃,第三气氛环境包括惰性气氛或真空环境。上述方法处理的导流筒,表面不易氧化损坏,避免发生表面开裂、掉块。
Treatment method of guide cylinder
The invention discloses a treatment method of a guide cylinder. The treatment method comprises the following steps: a deposition step: placing the guide cylinder in hydrocarbon gas for deposition to form a pyrolytic carbon layer; a dipping step: dipping the guide cylinder with the pyrolytic carbon layer in the precursor liquid; a high-temperature treatment step: treating the dipped guide cylinder in a first atmosphere environment at a first temperature for 1-4 hours; the guide cylinder treated at the first temperature is placed in a second atmosphere environment to be treated at the second temperature for 5-30 min; the guide cylinder treated at the second temperature is placed in a third atmosphere environment to be treated at the third temperature for 1-4 h; the precursor liquid comprises polycarbosilane, SiC and a solvent; the first temperature is 120-200 DEG C, and the first atmosphere environment comprises an inert atmosphere or a vacuum environment; the second temperature is 800-1200 DEG C, and the second atmosphere environment comprises an oxidizing atmosphere; the third temperature is 1300-1500 DEG C, and the third atmosphere environment comprises an inert atmosphere or a vacuum environment. The surface of the guide cylinder treated by the method is not easy to oxidize and damage, and surface cracking and chipping are avoided.
本发明公开一种导流筒的处理方法,包括:沉积步骤:将导流筒置于碳氢化合物气体中沉积形成热解碳层;浸渍步骤:将具有热解碳层的导流筒置于前驱体液中浸渍;高温处理步骤:将浸渍后的导流筒置于第一气氛环境中在第一温度下处理1‑4h;将在第一温度下处理后的导流筒置于第二气氛环境中在第二温度下处理5‑30min;将在第二温度下处理后的导流筒置于第三气氛环境中在第三温度下处理1‑4h;前驱体液包括聚碳硅烷、SiC、溶剂;第一温度为120‑200℃,第一气氛环境包括惰性气氛或真空环境;第二温度为800‑1200℃,第二气氛环境包括氧化性气氛;第三温度为1300‑1500℃,第三气氛环境包括惰性气氛或真空环境。上述方法处理的导流筒,表面不易氧化损坏,避免发生表面开裂、掉块。
Treatment method of guide cylinder
导流筒的处理方法
SHI TIEZHU (author) / PAN HAO (author) / QIN ZHONGZHENG (author)
2024-01-02
Patent
Electronic Resource
Chinese
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