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Aluminum nitride-based composite ceramic substrate and preparation method thereof
The invention relates to the technical field of ceramic substrate materials, in particular to an aluminum nitride-based composite ceramic substrate and a preparation method thereof. The aluminum nitride-based composite ceramic substrate is prepared from the following raw materials: 105-120 parts of aluminum nitride, 7-14 parts of boron nitride whiskers, 4-8 parts of cordierite, 27-49 parts of a sintering aid, 12-16 parts of a plasticizer, 6-13 parts of a dispersing agent, 16-25 parts of a binder and 85-115 parts of an organic solvent. Barium strontium titanate is doped in an aluminum nitride-based substrate material, cesium zirconate is added, the mechanical properties such as bending strength and fracture toughness of the aluminum nitride-based ceramic substrate can be improved, the bonding strength of the aluminum nitride-based ceramic substrate to unequal metals such as gold, silver and copper can be further improved, and the overall reliability of the ceramic substrate is improved.
本发明涉及陶瓷基板材料技术领域，尤其涉及一种氮化铝基复合陶瓷基板及其制备方法。所述氮化铝基复合陶瓷基板由以下原料组成：氮化铝105~120份、氮化硼晶须7~14份、堇青石4~8份、助烧剂27~49份、增塑剂12~16份、分散剂6~13份、粘结剂16~25份、有机溶剂85~115份。本发明通过在氮化铝基基板材料中掺杂钛酸锶钡加入锆酸铯，不仅能改善氮化铝基陶瓷基板抗弯强度、断裂韧性等力学性能，还能进一步提高氮化铝基陶瓷基板对金、银、铜等不等金属的结合强度，提高了陶瓷基板整体可靠性。
Aluminum nitride-based composite ceramic substrate and preparation method thereof
The invention relates to the technical field of ceramic substrate materials, in particular to an aluminum nitride-based composite ceramic substrate and a preparation method thereof. The aluminum nitride-based composite ceramic substrate is prepared from the following raw materials: 105-120 parts of aluminum nitride, 7-14 parts of boron nitride whiskers, 4-8 parts of cordierite, 27-49 parts of a sintering aid, 12-16 parts of a plasticizer, 6-13 parts of a dispersing agent, 16-25 parts of a binder and 85-115 parts of an organic solvent. Barium strontium titanate is doped in an aluminum nitride-based substrate material, cesium zirconate is added, the mechanical properties such as bending strength and fracture toughness of the aluminum nitride-based ceramic substrate can be improved, the bonding strength of the aluminum nitride-based ceramic substrate to unequal metals such as gold, silver and copper can be further improved, and the overall reliability of the ceramic substrate is improved.
本发明涉及陶瓷基板材料技术领域，尤其涉及一种氮化铝基复合陶瓷基板及其制备方法。所述氮化铝基复合陶瓷基板由以下原料组成：氮化铝105~120份、氮化硼晶须7~14份、堇青石4~8份、助烧剂27~49份、增塑剂12~16份、分散剂6~13份、粘结剂16~25份、有机溶剂85~115份。本发明通过在氮化铝基基板材料中掺杂钛酸锶钡加入锆酸铯，不仅能改善氮化铝基陶瓷基板抗弯强度、断裂韧性等力学性能，还能进一步提高氮化铝基陶瓷基板对金、银、铜等不等金属的结合强度，提高了陶瓷基板整体可靠性。
Aluminum nitride-based composite ceramic substrate and preparation method thereof
一种氮化铝基复合陶瓷基板及其制备方法
CHEN QI (author) / LI XIANPING (author) / TANG BAOFA (author) / YANG ZAIFU (author) / SHAO JIAWEI (author) / WU YUHAO (author)
2024-01-09
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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