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Silicon nitride-based composite ceramic substrate and preparation method thereof
The invention relates to the technical field of ceramic substrate materials, in particular to a silicon nitride-based composite ceramic substrate and a preparation method thereof. The silicon nitride-based composite ceramic substrate is prepared from the following raw materials in parts by weight: 95-110 parts of silicon nitride, 4-8 parts of boron nitride whiskers, 7-14 parts of potassium hexatitanate whiskers, 22-38 parts of a sintering aid, 14-20 parts of a plasticizer, 6-15 parts of a dispersing agent, 16-25 parts of a binder and 85-115 parts of an organic solvent. The titanium carbonitride and the zirconium tungstate are added into the silicon nitride-based substrate material, so that the mechanical properties such as bending strength and fracture toughness of the silicon nitride-based ceramic substrate can be improved, the bonding strength of the silicon nitride-based ceramic substrate to unequal metals such as titanium, nickel and aluminum can be further improved, and the overall reliability of the ceramic substrate is improved.
本发明涉及陶瓷基板材料技术领域，尤其涉及一种氮化硅基复合陶瓷基板及其制备方法。所述氮化硅基复合陶瓷基板由以下原料组成：氮化硅95~110份、氮化硼晶须4~8份、六钛酸钾晶须7~14份、助烧剂22~38份、增塑剂14~20份、分散剂6~15份、粘结剂16~25份、有机溶剂85~115份。本发明通过在氮化硅基基板材料中加入碳氮化钛、钨酸锆，不仅能改善氮化硅基陶瓷基板抗弯强度、断裂韧性等力学性能，还能进一步提高氮化硅基陶瓷基板对钛、镍、铝等不等金属的结合强度，提高了陶瓷基板整体可靠性。
Silicon nitride-based composite ceramic substrate and preparation method thereof
The invention relates to the technical field of ceramic substrate materials, in particular to a silicon nitride-based composite ceramic substrate and a preparation method thereof. The silicon nitride-based composite ceramic substrate is prepared from the following raw materials in parts by weight: 95-110 parts of silicon nitride, 4-8 parts of boron nitride whiskers, 7-14 parts of potassium hexatitanate whiskers, 22-38 parts of a sintering aid, 14-20 parts of a plasticizer, 6-15 parts of a dispersing agent, 16-25 parts of a binder and 85-115 parts of an organic solvent. The titanium carbonitride and the zirconium tungstate are added into the silicon nitride-based substrate material, so that the mechanical properties such as bending strength and fracture toughness of the silicon nitride-based ceramic substrate can be improved, the bonding strength of the silicon nitride-based ceramic substrate to unequal metals such as titanium, nickel and aluminum can be further improved, and the overall reliability of the ceramic substrate is improved.
本发明涉及陶瓷基板材料技术领域，尤其涉及一种氮化硅基复合陶瓷基板及其制备方法。所述氮化硅基复合陶瓷基板由以下原料组成：氮化硅95~110份、氮化硼晶须4~8份、六钛酸钾晶须7~14份、助烧剂22~38份、增塑剂14~20份、分散剂6~15份、粘结剂16~25份、有机溶剂85~115份。本发明通过在氮化硅基基板材料中加入碳氮化钛、钨酸锆，不仅能改善氮化硅基陶瓷基板抗弯强度、断裂韧性等力学性能，还能进一步提高氮化硅基陶瓷基板对钛、镍、铝等不等金属的结合强度，提高了陶瓷基板整体可靠性。
Silicon nitride-based composite ceramic substrate and preparation method thereof
一种氮化硅基复合陶瓷基板及其制备方法
CHEN QI (author) / LI XIANPING (author) / TANG BAOFA (author) / YANG ZAIFU (author) / SHAO JIAWEI (author) / WU YUHAO (author)
2024-04-05
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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