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High-temperature-resistant quick-response piezoelectric sensitive ceramic element and preparation method thereof
The invention discloses a high-temperature-resistant quick-response piezoelectric sensitive ceramic element and a preparation method thereof. The chemical composition of the ceramic element is BiScO3 (1-x)-xPbTiO3 + ywt% C, x is more than or equal to 0.34 and less than or equal to 0.38, and y is more than or equal to 0.2 and less than or equal to 0.6. The Curie temperature Tc of the prepared piezoelectric sensitive ceramic element is 420 +/-20 DEG C, the piezoelectric coefficient d33 is 360 +/-20 pC/N, and the dielectric loss is tg theta lt; the response time of # imgabs0 # is less than or equal to 2 microseconds, an SEM (scanning electron microscope) shows that the sensitive element is compact in structure and has few defects, and the density is improved by 13.5% compared with that of a common PZT material. The piezoelectric sensitive ceramic element prepared by the invention has the characteristics of high Curie temperature, small temperature excursion coefficient, high piezoelectricity, low loss and quick response, can be used as a sensitive element of a high-frequency dynamic pressure sensor and an acceleration sensor, and is simple in preparation process.
本发明公开了一种耐高温快速响应的压电敏感陶瓷元件及其制备方法。该陶瓷元件的化学组成为：BiScO3(1‑x)‑xPbTiO3+ywt％C，其中，0.34≤x≤0.38，0.2≤y≤0.6。本发明制备得到的压电敏感陶瓷元件的居里温度Tc＝420±20℃，压电系数d33＝360±20pC/N，介质损耗tgθ<1％，#imgabs0#响应时间≤2μs，SEM电镜表明该敏感元件结构致密缺陷少，密度较一般的PZT材料提升13.5％。本申请制备得到的压电敏感陶瓷元件具有居里温度高、温漂系数小、压电性高、损耗低、响应迅速的特点，可以作为高频动态压力传感器和加速度传感器的敏感元件，同时其制备工艺简单。
High-temperature-resistant quick-response piezoelectric sensitive ceramic element and preparation method thereof
The invention discloses a high-temperature-resistant quick-response piezoelectric sensitive ceramic element and a preparation method thereof. The chemical composition of the ceramic element is BiScO3 (1-x)-xPbTiO3 + ywt% C, x is more than or equal to 0.34 and less than or equal to 0.38, and y is more than or equal to 0.2 and less than or equal to 0.6. The Curie temperature Tc of the prepared piezoelectric sensitive ceramic element is 420 +/-20 DEG C, the piezoelectric coefficient d33 is 360 +/-20 pC/N, and the dielectric loss is tg theta lt; the response time of # imgabs0 # is less than or equal to 2 microseconds, an SEM (scanning electron microscope) shows that the sensitive element is compact in structure and has few defects, and the density is improved by 13.5% compared with that of a common PZT material. The piezoelectric sensitive ceramic element prepared by the invention has the characteristics of high Curie temperature, small temperature excursion coefficient, high piezoelectricity, low loss and quick response, can be used as a sensitive element of a high-frequency dynamic pressure sensor and an acceleration sensor, and is simple in preparation process.
本发明公开了一种耐高温快速响应的压电敏感陶瓷元件及其制备方法。该陶瓷元件的化学组成为：BiScO3(1‑x)‑xPbTiO3+ywt％C，其中，0.34≤x≤0.38，0.2≤y≤0.6。本发明制备得到的压电敏感陶瓷元件的居里温度Tc＝420±20℃，压电系数d33＝360±20pC/N，介质损耗tgθ<1％，#imgabs0#响应时间≤2μs，SEM电镜表明该敏感元件结构致密缺陷少，密度较一般的PZT材料提升13.5％。本申请制备得到的压电敏感陶瓷元件具有居里温度高、温漂系数小、压电性高、损耗低、响应迅速的特点，可以作为高频动态压力传感器和加速度传感器的敏感元件，同时其制备工艺简单。
High-temperature-resistant quick-response piezoelectric sensitive ceramic element and preparation method thereof
一种耐高温快速响应的压电敏感陶瓷元件及其制备方法
WANG BO (author) / XIONG YANMEI (author) / ZHAO CONG (author) / PENG PENG (author) / LIANG DAYUN (author) / FENG TING (author) / HU LU (author) / XIONG WEIPU (author) / YU KUAI (author)
2024-01-16
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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