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Zirconium oxide evaporation material and preparation method thereof
The invention belongs to the technical field of optical thin-film material production, and discloses a preparation method of a zirconium oxide evaporation material, which comprises the following steps: mixing zirconium oxide powder and pure water, homogenizing, performing spray granulation to obtain powder I, sintering the powder I once, sieving, and respectively performing ball milling to obtain powder II and powder III with different particle sizes; the preparation method comprises the following steps: mixing powder II and powder III according to a mass ratio of (2-5): (5-8) to obtain powder IV, mixing the powder IV with pure water, pressing to obtain a green body, and finally carrying out secondary sintering on the green body to obtain the zirconium oxide evaporation material. Meanwhile, stress caused by temperature in the evaporation process can be reduced, so that cracking is reduced, and the invention further discloses the zirconium oxide evaporation material.
本申请属于光学薄膜材料生产技术领域，公开了一种氧化锆蒸发料的制备方法，本方法先将氧化锆粉末和纯水混合、均质、喷雾造粒，制得粉体一，再将粉体一一次烧结、过筛，过筛后分别球磨制得粒径不同的粉体二，粉体三；再将粉体二、粉体三按2‑5：5‑8的质量比混合，制得粉体四，随后将粉体四与纯水混合，压制为生坯，最后将生坯二次烧结制得氧化锆蒸发料，本申请使用不同粒径的粉体混料后进行压制烧结，有效地增加了蒸发料强度，同时可以减少蒸发过程中由于温度造成的应力，从而减少开裂，此外本申请还公开了一种氧化锆蒸发料。
Zirconium oxide evaporation material and preparation method thereof
The invention belongs to the technical field of optical thin-film material production, and discloses a preparation method of a zirconium oxide evaporation material, which comprises the following steps: mixing zirconium oxide powder and pure water, homogenizing, performing spray granulation to obtain powder I, sintering the powder I once, sieving, and respectively performing ball milling to obtain powder II and powder III with different particle sizes; the preparation method comprises the following steps: mixing powder II and powder III according to a mass ratio of (2-5): (5-8) to obtain powder IV, mixing the powder IV with pure water, pressing to obtain a green body, and finally carrying out secondary sintering on the green body to obtain the zirconium oxide evaporation material. Meanwhile, stress caused by temperature in the evaporation process can be reduced, so that cracking is reduced, and the invention further discloses the zirconium oxide evaporation material.
本申请属于光学薄膜材料生产技术领域，公开了一种氧化锆蒸发料的制备方法，本方法先将氧化锆粉末和纯水混合、均质、喷雾造粒，制得粉体一，再将粉体一一次烧结、过筛，过筛后分别球磨制得粒径不同的粉体二，粉体三；再将粉体二、粉体三按2‑5：5‑8的质量比混合，制得粉体四，随后将粉体四与纯水混合，压制为生坯，最后将生坯二次烧结制得氧化锆蒸发料，本申请使用不同粒径的粉体混料后进行压制烧结，有效地增加了蒸发料强度，同时可以减少蒸发过程中由于温度造成的应力，从而减少开裂，此外本申请还公开了一种氧化锆蒸发料。
Zirconium oxide evaporation material and preparation method thereof
一种氧化锆蒸发料及其制备方法
LUO YANG (author) / CHEN PENGZHOU (author) / YU FANG (author) / LIU WENJIE (author)
2024-03-12
Patent
Electronic Resource
Chinese
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