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Sintering equipment for producing silicon nitride substrate
The invention relates to sintering equipment for silicon nitride substrate production, and relates to the field of silicon nitride substrate production. The heating bin is used for heating the substrate, and the heating bin is erected on the base; the heating bin is used for heating the substrate, the feeding piece is used for bearing the substrate, the feeding piece is connected with the base, the heating bin is provided with an inlet and outlet for the feeding piece to enter, the feeding piece is provided with a preheating hole communicated with the heating bin, and before the substrate on the feeding piece enters the heating bin, hot air in the heating bin preheats the substrate through the preheating hole. A worker places a substrate on the feeding piece, and at the moment, hot air in the heating bin is continuously sprayed out through the preheating holes and makes contact with the substrate, so that the substrate is preheated; and the preheating holes are formed in the feeding piece, so that preheating of the base plate is achieved, and the sintering efficiency of the base plate is improved.
本申请涉及一种氮化硅基板生产烧结设备，涉及氮化硅基板生产的领域,烧结设备包括：基座；加热仓，用于对基板进行加热，且所述加热仓架设于基座上；上料件，用于承载基板，所述上料件与基座连接，所述加热仓上开设有供上料件进入的进出口，所述上料件上开设有与加热仓连通的预热孔，在上料件上的基板进入加热仓之前，所述加热仓中的热气经预热孔对基板进行预热。工作人员将基板放置于上料件上，此时加热仓中的热气不断经预热孔喷出并与基板接触，从而对基板进行预热；上料件上预热孔的设置实现了基板的预热，提高了基板的烧结效率。
Sintering equipment for producing silicon nitride substrate
The invention relates to sintering equipment for silicon nitride substrate production, and relates to the field of silicon nitride substrate production. The heating bin is used for heating the substrate, and the heating bin is erected on the base; the heating bin is used for heating the substrate, the feeding piece is used for bearing the substrate, the feeding piece is connected with the base, the heating bin is provided with an inlet and outlet for the feeding piece to enter, the feeding piece is provided with a preheating hole communicated with the heating bin, and before the substrate on the feeding piece enters the heating bin, hot air in the heating bin preheats the substrate through the preheating hole. A worker places a substrate on the feeding piece, and at the moment, hot air in the heating bin is continuously sprayed out through the preheating holes and makes contact with the substrate, so that the substrate is preheated; and the preheating holes are formed in the feeding piece, so that preheating of the base plate is achieved, and the sintering efficiency of the base plate is improved.
本申请涉及一种氮化硅基板生产烧结设备，涉及氮化硅基板生产的领域,烧结设备包括：基座；加热仓，用于对基板进行加热，且所述加热仓架设于基座上；上料件，用于承载基板，所述上料件与基座连接，所述加热仓上开设有供上料件进入的进出口，所述上料件上开设有与加热仓连通的预热孔，在上料件上的基板进入加热仓之前，所述加热仓中的热气经预热孔对基板进行预热。工作人员将基板放置于上料件上，此时加热仓中的热气不断经预热孔喷出并与基板接触，从而对基板进行预热；上料件上预热孔的设置实现了基板的预热，提高了基板的烧结效率。
Sintering equipment for producing silicon nitride substrate
一种氮化硅基板生产烧结设备
WANG MEILING (author) / WANG CHANGXU (author) / SONG HAITAO (author)
2024-05-03
Patent
Electronic Resource
Chinese
IPC:
F27B
Industrieöfen, Schachtöfen, Brennöfen, Retorten allgemein
,
FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL
/
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
Silicon nitride substrate and method for producing silicon nitride substrate
| European Patent Office | 2017
| European Patent Office | 2024
| European Patent Office | 2024