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TZO ceramic powder as well as preparation method and application thereof
The invention relates to the field of coated ceramic target materials, in particular to TZO ceramic powder and a preparation method and application thereof.The TZO ceramic powder has the chemical general formula of (1-x) SnO2-xZnO, x is 48-52 (weight percentage, wt.%), the TZO ceramic powder is prepared through primary ball-milling powder, secondary ball-milling powder, primary calcination powder, spray granulation powder and secondary calcination powder, and the TZO ceramic powder has the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO. Therefore, the high-apparent-density, high-sphericity and high-fluidity TZO ceramic powder for plasma spraying, which cannot be obtained by a traditional crushing process, is obtained, so that the TZO ceramic powder has higher powdering rate, and a more effective preparation method of the TZO powder is formed.
本发明涉及镀膜陶瓷靶材领域,特别涉及一种TZO陶瓷粉体及其制备方法和应用,该TZO陶瓷粉体的化学通式为:(1‑x)SnO2‑xZnO,其中,x=48‑52(重量百分比,wt.%),其通过一次球磨粉、二次球磨粉、一次煅烧粉、喷雾造粒粉、二次煅烧粉制备而成,从而获得传统破碎工艺无法获得的高松装密度、高球形度、高流动性等离子体喷涂用TZO陶瓷粉体,从而具有更高的上粉率,形成一种更有效的TZO粉体制备方法。
TZO ceramic powder as well as preparation method and application thereof
The invention relates to the field of coated ceramic target materials, in particular to TZO ceramic powder and a preparation method and application thereof.The TZO ceramic powder has the chemical general formula of (1-x) SnO2-xZnO, x is 48-52 (weight percentage, wt.%), the TZO ceramic powder is prepared through primary ball-milling powder, secondary ball-milling powder, primary calcination powder, spray granulation powder and secondary calcination powder, and the TZO ceramic powder has the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO and the chemical formula of (1-x) SnO2-xZnO. Therefore, the high-apparent-density, high-sphericity and high-fluidity TZO ceramic powder for plasma spraying, which cannot be obtained by a traditional crushing process, is obtained, so that the TZO ceramic powder has higher powdering rate, and a more effective preparation method of the TZO powder is formed.
本发明涉及镀膜陶瓷靶材领域,特别涉及一种TZO陶瓷粉体及其制备方法和应用,该TZO陶瓷粉体的化学通式为:(1‑x)SnO2‑xZnO,其中,x=48‑52(重量百分比,wt.%),其通过一次球磨粉、二次球磨粉、一次煅烧粉、喷雾造粒粉、二次煅烧粉制备而成,从而获得传统破碎工艺无法获得的高松装密度、高球形度、高流动性等离子体喷涂用TZO陶瓷粉体,从而具有更高的上粉率,形成一种更有效的TZO粉体制备方法。
TZO ceramic powder as well as preparation method and application thereof
一种TZO陶瓷粉体及其制备方法和应用
KONG LINGBING (author) / ZHU BING (author) / HUANG XIAOJUN (author) / ZHU HAITAO (author) / ZHU JIACHEN (author)
2024-05-14
Patent
Electronic Resource
Chinese
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