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LTCC (Low Temperature Co-Fired Ceramic) green tape as well as manufacturing method and laser drilling method thereof
The invention provides an LTCC (Low Temperature Co-Fired Ceramic) green tape and a manufacturing method and a laser drilling method thereof. The LTCC green tape comprises a green tape film, a first release film and a reserved film, the green tape film, the first release film and the reserved film are overlapped in sequence to form an LTCC green tape suitable for laser drilling; the first release film is used as a casting support carrier film of the green tape film; the green tape film is a green tape which is attached to the first release film and is obtained through tape casting, and the green tape film is used as a basic film of the LTCC green tape; the reserved film is adhered to the first release film, is temporarily reserved before the LTCC green tape is subjected to laser drilling, and is removed after the LTCC green tape is subjected to laser drilling. The three-layer structure meeting the performance requirement of the laser drilling material is arranged before drilling, the reserved film is removed after drilling is conducted through the laser drilling method, the hole opening and the inner wall of the raw ceramic tape after drilling are almost free of residues, burrs, blackening, melting and ellipse phenomena, and the accuracy and the qualified rate of the hole size are improved.
本申请提供一种LTCC生瓷带及其制造方法、激光打孔方法,其中LTCC生瓷带包括生瓷带膜、第一离型膜和预留膜;生瓷带膜、第一离型膜和预留膜依次叠加形成适于激光打孔的LTCC生瓷带;第一离型膜作为生瓷带膜的流延支撑载膜;生瓷带膜为附载于第一离型膜上流延成型得到的生瓷带,生瓷带膜作为LTCC生瓷带的基础膜;预留膜粘附于第一离型膜,预留膜在LTCC生瓷带进行激光打孔前暂时保留,并在LTCC生瓷带完成激光打孔后去除。在打孔前设置满足激光打孔材料性能要求的三层结构,且采用激光打孔方法进行打孔后去除预留膜,实现打孔后生瓷带孔口及内壁几乎无残渣毛刺、无发黑熔融、无椭圆的现象发生,提升孔尺寸的精确性和合格率。
LTCC (Low Temperature Co-Fired Ceramic) green tape as well as manufacturing method and laser drilling method thereof
The invention provides an LTCC (Low Temperature Co-Fired Ceramic) green tape and a manufacturing method and a laser drilling method thereof. The LTCC green tape comprises a green tape film, a first release film and a reserved film, the green tape film, the first release film and the reserved film are overlapped in sequence to form an LTCC green tape suitable for laser drilling; the first release film is used as a casting support carrier film of the green tape film; the green tape film is a green tape which is attached to the first release film and is obtained through tape casting, and the green tape film is used as a basic film of the LTCC green tape; the reserved film is adhered to the first release film, is temporarily reserved before the LTCC green tape is subjected to laser drilling, and is removed after the LTCC green tape is subjected to laser drilling. The three-layer structure meeting the performance requirement of the laser drilling material is arranged before drilling, the reserved film is removed after drilling is conducted through the laser drilling method, the hole opening and the inner wall of the raw ceramic tape after drilling are almost free of residues, burrs, blackening, melting and ellipse phenomena, and the accuracy and the qualified rate of the hole size are improved.
本申请提供一种LTCC生瓷带及其制造方法、激光打孔方法,其中LTCC生瓷带包括生瓷带膜、第一离型膜和预留膜;生瓷带膜、第一离型膜和预留膜依次叠加形成适于激光打孔的LTCC生瓷带;第一离型膜作为生瓷带膜的流延支撑载膜;生瓷带膜为附载于第一离型膜上流延成型得到的生瓷带,生瓷带膜作为LTCC生瓷带的基础膜;预留膜粘附于第一离型膜,预留膜在LTCC生瓷带进行激光打孔前暂时保留,并在LTCC生瓷带完成激光打孔后去除。在打孔前设置满足激光打孔材料性能要求的三层结构,且采用激光打孔方法进行打孔后去除预留膜,实现打孔后生瓷带孔口及内壁几乎无残渣毛刺、无发黑熔融、无椭圆的现象发生,提升孔尺寸的精确性和合格率。
LTCC (Low Temperature Co-Fired Ceramic) green tape as well as manufacturing method and laser drilling method thereof
一种LTCC生瓷带及其制造方法、激光打孔方法
TAO KEWEN (author) / YU HANG (author) / LUO XIONGKE (author)
2024-05-24
Patent
Electronic Resource
Chinese
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