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Processing method and equipment of high-performance silicon carbide ceramic substrate composite material
The invention provides a processing method of a high-performance silicon carbide ceramic substrate composite material, which comprises the following steps: mixing silicon carbide, rare earth oxide, clay, aluminum oxide, barium carbonate and talcum powder to prepare slurry; 2, diamond particles are added into the slurry prepared in the step 1 for mixing, and a to-be-sintered blank is prepared; pressing the to-be-sintered green body to obtain a blank; the blank is placed in a sintering furnace to be subjected to primary sintering, and a primary product is prepared; and putting the primary body into a sintering furnace for secondary sintering, and cooling and molding to obtain the high-performance silicon carbide ceramic substrate composite material. The rare earth oxide is introduced to improve the heat conduction rate of the SiC ceramic, the sintering temperature is reduced, the cost is reduced, the diamond particles are introduced to further improve the heat conductivity of the SiC ceramic, and reasonable high-temperature heat treatment can promote growth of silicon carbide crystals, improve the crystallinity and reduce phonon scattering caused by crystal defects, so that the heat conductivity of the SiC ceramic is improved. And the thermal conductivity of the composite material is further improved.
本发明提供了一种高性能碳化硅陶瓷基板复合材料的加工方法，包括以下步骤：将碳化硅、稀土氧化物、粘土、氧化铝、碳酸钡和滑石粉进行混合，制得浆料；向步骤一制得的浆料中加入金刚石颗粒进行混合，制得待烧结胚体；将待烧结坯体进行压制，制得毛坯；将毛胚置于烧结炉中进行一次烧结，制得初制体；将初制体置于烧结炉中进行二次烧结，冷却成型后，制得高性能碳化硅陶瓷基板复合材料。本发明通过引入稀土氧化物提高了SiC陶瓷的导热速率，同时降低烧结温度，减少成本，通过引入金刚石颗粒，进一步提高SiC陶瓷的导热率，同时合理的高温热处理可促进碳化硅晶体长大，提高结晶度，减少晶体缺陷带来的声子散射，再次提高复合材料的导热率。
Processing method and equipment of high-performance silicon carbide ceramic substrate composite material
The invention provides a processing method of a high-performance silicon carbide ceramic substrate composite material, which comprises the following steps: mixing silicon carbide, rare earth oxide, clay, aluminum oxide, barium carbonate and talcum powder to prepare slurry; 2, diamond particles are added into the slurry prepared in the step 1 for mixing, and a to-be-sintered blank is prepared; pressing the to-be-sintered green body to obtain a blank; the blank is placed in a sintering furnace to be subjected to primary sintering, and a primary product is prepared; and putting the primary body into a sintering furnace for secondary sintering, and cooling and molding to obtain the high-performance silicon carbide ceramic substrate composite material. The rare earth oxide is introduced to improve the heat conduction rate of the SiC ceramic, the sintering temperature is reduced, the cost is reduced, the diamond particles are introduced to further improve the heat conductivity of the SiC ceramic, and reasonable high-temperature heat treatment can promote growth of silicon carbide crystals, improve the crystallinity and reduce phonon scattering caused by crystal defects, so that the heat conductivity of the SiC ceramic is improved. And the thermal conductivity of the composite material is further improved.
本发明提供了一种高性能碳化硅陶瓷基板复合材料的加工方法，包括以下步骤：将碳化硅、稀土氧化物、粘土、氧化铝、碳酸钡和滑石粉进行混合，制得浆料；向步骤一制得的浆料中加入金刚石颗粒进行混合，制得待烧结胚体；将待烧结坯体进行压制，制得毛坯；将毛胚置于烧结炉中进行一次烧结，制得初制体；将初制体置于烧结炉中进行二次烧结，冷却成型后，制得高性能碳化硅陶瓷基板复合材料。本发明通过引入稀土氧化物提高了SiC陶瓷的导热速率，同时降低烧结温度，减少成本，通过引入金刚石颗粒，进一步提高SiC陶瓷的导热率，同时合理的高温热处理可促进碳化硅晶体长大，提高结晶度，减少晶体缺陷带来的声子散射，再次提高复合材料的导热率。
Processing method and equipment of high-performance silicon carbide ceramic substrate composite material
一种高性能碳化硅陶瓷基板复合材料的加工方法及设备
WANG XI (author) / XU CHENGMING (author) / HU ERYING (author) / YUAN FANG (author) / LI QIUYING (author)
2024-05-31
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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