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Silicon nitride powder as well as preparation method and application thereof
The invention provides silicon nitride powder and a preparation method thereof. The method comprises the following steps: mixing 3wt%-30wt% of silicon powder and 70wt%-97wt% of precursor powder in a protective atmosphere to form a powder mixture; and roasting the powder mixture in a nitrogen-containing atmosphere to obtain the silicon nitride powder, the precursor powder being selected from a group consisting of amino silicon, imino silicon and amorphous silicon nitride. The silicon nitride powder disclosed by the invention has the characteristics of high crystallinity, narrow particle size distribution, regular particle morphology and the like, and has a wide application prospect in the fields of silicon nitride ceramic bearings, integrated circuit substrates, heat-conducting glue fillers and the like.
本申请提供了一种氮化硅粉体及其制备方法。该方法包括在保护性气氛中混合3wt%‑30wt%的硅粉与70wt%‑97wt%的前驱体粉末,形成粉体混合物;在含氮气氛中焙烧所述粉体混合物,得到所述氮化硅粉体,所述前驱体粉末选自由氨基硅、亚氨基硅以及非晶态氮化硅组成的组。本申请的氮化硅粉体具有结晶度高、粒径分布窄、颗粒形貌规则等特点,在氮化硅陶瓷轴承、集成电路基板、导热胶填料等领域具有广阔的应用前景。
Silicon nitride powder as well as preparation method and application thereof
The invention provides silicon nitride powder and a preparation method thereof. The method comprises the following steps: mixing 3wt%-30wt% of silicon powder and 70wt%-97wt% of precursor powder in a protective atmosphere to form a powder mixture; and roasting the powder mixture in a nitrogen-containing atmosphere to obtain the silicon nitride powder, the precursor powder being selected from a group consisting of amino silicon, imino silicon and amorphous silicon nitride. The silicon nitride powder disclosed by the invention has the characteristics of high crystallinity, narrow particle size distribution, regular particle morphology and the like, and has a wide application prospect in the fields of silicon nitride ceramic bearings, integrated circuit substrates, heat-conducting glue fillers and the like.
本申请提供了一种氮化硅粉体及其制备方法。该方法包括在保护性气氛中混合3wt%‑30wt%的硅粉与70wt%‑97wt%的前驱体粉末,形成粉体混合物;在含氮气氛中焙烧所述粉体混合物,得到所述氮化硅粉体,所述前驱体粉末选自由氨基硅、亚氨基硅以及非晶态氮化硅组成的组。本申请的氮化硅粉体具有结晶度高、粒径分布窄、颗粒形貌规则等特点,在氮化硅陶瓷轴承、集成电路基板、导热胶填料等领域具有广阔的应用前景。
Silicon nitride powder as well as preparation method and application thereof
氮化硅粉体及其制备方法、用途
HAN ZHAO (author) / LIU PENGFEI (author) / XI WEI (author)
2024-06-04
Patent
Electronic Resource
Chinese
IPC:
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C09G
Poliermittelmischungen, ausgenommen Möbelpolituren
,
POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH
/
C09K
Materialien für Anwendungen, soweit nicht anderweitig vorgesehen
,
MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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