A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Device for carrying crown block across different grades of dust-free rooms
The invention discloses a device for carrying a crown block across different grades of dust-free rooms, and relates to the technical field of crown block carrying in semiconductor manufacturing. The system comprises an automatic door control system and a crown block control system, and the automatic door control system is in signal connection with the crown block control system; the automatic door control system is composed of a sliding door unit, a sensing unit and a control unit. The control unit is used for performing signal control on the work of the sliding door unit and the sensing unit; the sliding door unit communicates with the crown block control system in real time, and receives a door opening and closing instruction issued by the crown block control system; the sensing unit senses and confirms that the crown block control system is driven away; according to the invention, after the automatic door control system composed of the sliding door unit, the sensing unit and the control unit is in wireless communication connection with the crown block control system, automatic carrying of the crown block control system across different levels of dust-free rooms is realized, the semiconductor manufacturing efficiency is improved, and the influence of automatic carrying among different levels of dust-free rooms on the environment is reduced.
本发明公开一种实现天车跨不同等级无尘室搬运的装置，涉及半导体制造的天车搬运技术领域；而本发明包括自动门控制系统和天车控制系统，自动门控制系统与天车控制系统信号连接；自动门控制系统由滑动门单元、感应单元和控制单元组成；控制单元对滑动门单元及感应单元的工作进行信号控制；滑动门单元与天车控制系统进行实时通讯，滑动门单元接收天车控制系统下发的开关门指令；感应单元感应并确认天车控制系统驶离；本发明中，通过由滑动门单元、感应单元和控制单元组成的自动门控制系统，与天车控制系统无线通讯连接后，实现天车控制系统跨不同等级无尘室自动搬运，提高半导体制造的效率，并降低不同等级无尘室间自动搬运对环境造成的影响。
Device for carrying crown block across different grades of dust-free rooms
The invention discloses a device for carrying a crown block across different grades of dust-free rooms, and relates to the technical field of crown block carrying in semiconductor manufacturing. The system comprises an automatic door control system and a crown block control system, and the automatic door control system is in signal connection with the crown block control system; the automatic door control system is composed of a sliding door unit, a sensing unit and a control unit. The control unit is used for performing signal control on the work of the sliding door unit and the sensing unit; the sliding door unit communicates with the crown block control system in real time, and receives a door opening and closing instruction issued by the crown block control system; the sensing unit senses and confirms that the crown block control system is driven away; according to the invention, after the automatic door control system composed of the sliding door unit, the sensing unit and the control unit is in wireless communication connection with the crown block control system, automatic carrying of the crown block control system across different levels of dust-free rooms is realized, the semiconductor manufacturing efficiency is improved, and the influence of automatic carrying among different levels of dust-free rooms on the environment is reduced.
本发明公开一种实现天车跨不同等级无尘室搬运的装置，涉及半导体制造的天车搬运技术领域；而本发明包括自动门控制系统和天车控制系统，自动门控制系统与天车控制系统信号连接；自动门控制系统由滑动门单元、感应单元和控制单元组成；控制单元对滑动门单元及感应单元的工作进行信号控制；滑动门单元与天车控制系统进行实时通讯，滑动门单元接收天车控制系统下发的开关门指令；感应单元感应并确认天车控制系统驶离；本发明中，通过由滑动门单元、感应单元和控制单元组成的自动门控制系统，与天车控制系统无线通讯连接后，实现天车控制系统跨不同等级无尘室自动搬运，提高半导体制造的效率，并降低不同等级无尘室间自动搬运对环境造成的影响。
Device for carrying crown block across different grades of dust-free rooms
一种实现天车跨不同等级无尘室搬运的装置
XU ZHONG (author) / ZHAO JIAFENG (author) / ZHANG XIAOPENG (author)
2024-08-06
Patent
Electronic Resource
Chinese
Cement composites with limestone dust and different grades of wood sawdust
| Online Contents | 2007
Cement composites with limestone dust and different grades of wood sawdust
| British Library Online Contents | 2007