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A platform for research: civil engineering, architecture and urbanism
Sealing door structure and processing equipment
The invention belongs to the technical field of semiconductors, and discloses a sealing door structure and processing equipment, the processing equipment comprises a loading chamber and the sealing door structure, the sealing door structure comprises a door frame and a door plate assembly, the door frame is used for being installed at an opening of the loading chamber, a sealing assembly is arranged on the inner circumference of the door frame, and the door plate assembly is connected to the door frame in a lockable mode; the door plate assembly comprises an annular sealing piece, the annular sealing piece is fixedly arranged on the inner side of the door plate assembly, and when the door plate assembly closes the opening and closing opening of the door frame, at least part of the sealing assembly abuts against and compresses the annular sealing piece, and the part of the sealing assembly is wrapped by the annular sealing piece. Through the arrangement of the sealing door structure, the self-sealing effect is improved, the problem that the silicon wafer reacts with external gas and goes bad due to the fact that the low-oxygen inert gas atmosphere in the loading chamber provided with the sealing door structure is polluted is avoided, and the silicon wafer in the loading chamber can keep good performance.
本发明属于半导体技术领域，公开了一种密封门结构以及加工设备，加工设备包括装载室和密封门结构，密封门结构包括门框和门板组件，门框用于安装在装载室的开口处，门框的内周设置有密封组件，门板组件可锁止地连接于门框，以打开或关闭门框的开合口，门板组件包括环形密封件，环形密封件固定设置于门板组件的内侧，当门板组件关闭门框的开合口时，至少部分密封组件抵接压缩环形密封件且该部分密封组件被环形密封件所包覆。通过设置该密封门结构，提高了自身密封效果，避免安装该密封门结构的装载室内的低氧的惰性气体气氛被污染而造成硅片与外部气体反应变质的问题发生，使得装载室内的硅片可以保持良好的性能。
Sealing door structure and processing equipment
The invention belongs to the technical field of semiconductors, and discloses a sealing door structure and processing equipment, the processing equipment comprises a loading chamber and the sealing door structure, the sealing door structure comprises a door frame and a door plate assembly, the door frame is used for being installed at an opening of the loading chamber, a sealing assembly is arranged on the inner circumference of the door frame, and the door plate assembly is connected to the door frame in a lockable mode; the door plate assembly comprises an annular sealing piece, the annular sealing piece is fixedly arranged on the inner side of the door plate assembly, and when the door plate assembly closes the opening and closing opening of the door frame, at least part of the sealing assembly abuts against and compresses the annular sealing piece, and the part of the sealing assembly is wrapped by the annular sealing piece. Through the arrangement of the sealing door structure, the self-sealing effect is improved, the problem that the silicon wafer reacts with external gas and goes bad due to the fact that the low-oxygen inert gas atmosphere in the loading chamber provided with the sealing door structure is polluted is avoided, and the silicon wafer in the loading chamber can keep good performance.
本发明属于半导体技术领域，公开了一种密封门结构以及加工设备，加工设备包括装载室和密封门结构，密封门结构包括门框和门板组件，门框用于安装在装载室的开口处，门框的内周设置有密封组件，门板组件可锁止地连接于门框，以打开或关闭门框的开合口，门板组件包括环形密封件，环形密封件固定设置于门板组件的内侧，当门板组件关闭门框的开合口时，至少部分密封组件抵接压缩环形密封件且该部分密封组件被环形密封件所包覆。通过设置该密封门结构，提高了自身密封效果，避免安装该密封门结构的装载室内的低氧的惰性气体气氛被污染而造成硅片与外部气体反应变质的问题发生，使得装载室内的硅片可以保持良好的性能。
Sealing door structure and processing equipment
密封门结构以及加工设备
LONG ZHANYONG (author) / ZHOU LIANG (author) / LI YANQING (author) / WANG QINQIN (author) / LIN JIAJI (author)
2024-09-10
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
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