A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Sealing door, semiconductor processing equipment and semiconductor processing equipment
The invention provides a sealing door, semiconductor process equipment and semiconductor processing equipment. The sealing door comprises a driver, an outer plate, a middle plate and a sealing plate, the sealing plate is respectively connected with the outer plate and the middle plate through the first connecting part and the second connecting part; the driver drives the middle plate to translate in the second direction, and the first direction is parallel to the thickness direction of the outer plate and perpendicular to the second direction; when the middle plate is switched between the first position and the middle position, the outer plate and the sealing plate can be driven to move in the same direction; when the middle plate is switched between the second position and the middle position, the middle plate can move in the second direction relative to the outer plate and the sealing plate and can drive the sealing plate to move in the first direction, so that the sealing plate is close to or away from the storage cavity; in the second position, the sealing plate seals the storage chamber. According to the sealing door, the middle plate between the middle position and the second position is in linkage with the sealing plate, and an operator can accurately judge whether the storage cavity is completely sealed by the sealing plate or not according to the position of the middle plate.
本发明提供一种密封门、半导体工艺设备及半导体加工设备，密封门包括驱动器、沿第一方向依次设置的外板、中板和密封板；密封板通过第一连接部和第二连接部分别与外板及中板连接；驱动器驱动中板沿第二方向平移，第一方向平行于外板的厚度方向并垂直于第二方向；中板在第一位置和中间位置切换时，能够带动外板和密封板同向移动；中板在第二位置和中间位置切换时，能够相对于外板和密封板沿第二方向移动，并能够带动密封板沿第一方向移动，使得密封板靠近或远离存储腔室；在第二位置时，密封板密封存储腔室。本发明的密封门，在中间位置和第二位置之间的中板与密封板联动，操作人员根据中板的位置能够准确判断密封板是否完全封闭存储腔室。
Sealing door, semiconductor processing equipment and semiconductor processing equipment
The invention provides a sealing door, semiconductor process equipment and semiconductor processing equipment. The sealing door comprises a driver, an outer plate, a middle plate and a sealing plate, the sealing plate is respectively connected with the outer plate and the middle plate through the first connecting part and the second connecting part; the driver drives the middle plate to translate in the second direction, and the first direction is parallel to the thickness direction of the outer plate and perpendicular to the second direction; when the middle plate is switched between the first position and the middle position, the outer plate and the sealing plate can be driven to move in the same direction; when the middle plate is switched between the second position and the middle position, the middle plate can move in the second direction relative to the outer plate and the sealing plate and can drive the sealing plate to move in the first direction, so that the sealing plate is close to or away from the storage cavity; in the second position, the sealing plate seals the storage chamber. According to the sealing door, the middle plate between the middle position and the second position is in linkage with the sealing plate, and an operator can accurately judge whether the storage cavity is completely sealed by the sealing plate or not according to the position of the middle plate.
本发明提供一种密封门、半导体工艺设备及半导体加工设备，密封门包括驱动器、沿第一方向依次设置的外板、中板和密封板；密封板通过第一连接部和第二连接部分别与外板及中板连接；驱动器驱动中板沿第二方向平移，第一方向平行于外板的厚度方向并垂直于第二方向；中板在第一位置和中间位置切换时，能够带动外板和密封板同向移动；中板在第二位置和中间位置切换时，能够相对于外板和密封板沿第二方向移动，并能够带动密封板沿第一方向移动，使得密封板靠近或远离存储腔室；在第二位置时，密封板密封存储腔室。本发明的密封门，在中间位置和第二位置之间的中板与密封板联动，操作人员根据中板的位置能够准确判断密封板是否完全封闭存储腔室。
Sealing door, semiconductor processing equipment and semiconductor processing equipment
密封门、半导体工艺设备及半导体加工设备
CHANG HONGCHAO (author) / TIAN YONGAN (author) / WANG FUJIN (author) / WANG MINGWEI (author) / HAN BIN (author) / GAO BO (author)
2024-03-01
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
Sealing door device for semiconductor equipment vacuum cavity
| European Patent Office | 2021
Film box door opening device and semiconductor processing equipment
| European Patent Office | 2024