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Tantalum carbide coating as well as preparation method and application thereof
The invention relates to a tantalum carbide coating and a preparation method and application thereof.The preparation method comprises the steps that tantalum pentachloride is added into absolute ethyl alcohol to be dissolved, and alcohol-based tantalum sol is obtained; adding acetylacetone into the alcohol-based tantalum sol, and aging to obtain a first sol-gel solution; repeating the above steps, and adjusting the proportion of several components to obtain a second sol-gel solution; immersing a graphite crucible into the first sol-gel solution, taking out the graphite crucible, drying the graphite crucible, and coating the graphite crucible for multiple times to obtain a first graphite crucible/transition coating semi-finished product; immersing the first graphite crucible/transition coating semi-finished product into a second sol-gel solution, taking out the first graphite crucible/transition coating semi-finished product, drying, and coating for multiple times to obtain a second graphite crucible/transition coating/coating semi-finished product; and sintering the second graphite crucible/transition coating/coating semi-finished product at high temperature to obtain a graphite crucible/transition coating/tantalum carbide coating finished product. According to the invention, the TaC transition layer rich in less carbon is arranged between the TaC coating and the graphite crucible substrate, so that internal stress and microcracks caused by difference of thermal expansion coefficients between the graphite crucible substrate and the TaC coating can be effectively reduced.
本发明涉及一种碳化钽涂层及其制备方法和应用，包括：将五氯化钽加入无水乙醇中溶解，得醇基钽溶胶；将乙酰丙酮加入醇基钽溶胶，经陈化得第一溶胶凝胶溶液；重复前述步骤，调节几种组分比例，得第二溶胶凝胶溶液；将石墨坩埚浸入第一溶胶凝胶溶液，取出干燥，涂覆多次，得第一石墨坩埚/过渡涂层半成品；将第一石墨坩埚/过渡涂层半成品浸入第二溶胶凝胶溶液，取出干燥，涂覆多次，得第二石墨坩埚/过渡涂层/涂层半成品；将第二石墨坩埚/过渡涂层/涂层半成品高温烧结，得石墨坩埚/过渡层/碳化钽涂层成品。本发明在TaC涂层与石墨坩埚基底间设置富碳少TaC的过渡层，可有效降低石墨坩埚基底与TaC涂层之间因热膨胀系数差异引起的内应力和微裂纹。
Tantalum carbide coating as well as preparation method and application thereof
The invention relates to a tantalum carbide coating and a preparation method and application thereof.The preparation method comprises the steps that tantalum pentachloride is added into absolute ethyl alcohol to be dissolved, and alcohol-based tantalum sol is obtained; adding acetylacetone into the alcohol-based tantalum sol, and aging to obtain a first sol-gel solution; repeating the above steps, and adjusting the proportion of several components to obtain a second sol-gel solution; immersing a graphite crucible into the first sol-gel solution, taking out the graphite crucible, drying the graphite crucible, and coating the graphite crucible for multiple times to obtain a first graphite crucible/transition coating semi-finished product; immersing the first graphite crucible/transition coating semi-finished product into a second sol-gel solution, taking out the first graphite crucible/transition coating semi-finished product, drying, and coating for multiple times to obtain a second graphite crucible/transition coating/coating semi-finished product; and sintering the second graphite crucible/transition coating/coating semi-finished product at high temperature to obtain a graphite crucible/transition coating/tantalum carbide coating finished product. According to the invention, the TaC transition layer rich in less carbon is arranged between the TaC coating and the graphite crucible substrate, so that internal stress and microcracks caused by difference of thermal expansion coefficients between the graphite crucible substrate and the TaC coating can be effectively reduced.
本发明涉及一种碳化钽涂层及其制备方法和应用，包括：将五氯化钽加入无水乙醇中溶解，得醇基钽溶胶；将乙酰丙酮加入醇基钽溶胶，经陈化得第一溶胶凝胶溶液；重复前述步骤，调节几种组分比例，得第二溶胶凝胶溶液；将石墨坩埚浸入第一溶胶凝胶溶液，取出干燥，涂覆多次，得第一石墨坩埚/过渡涂层半成品；将第一石墨坩埚/过渡涂层半成品浸入第二溶胶凝胶溶液，取出干燥，涂覆多次，得第二石墨坩埚/过渡涂层/涂层半成品；将第二石墨坩埚/过渡涂层/涂层半成品高温烧结，得石墨坩埚/过渡层/碳化钽涂层成品。本发明在TaC涂层与石墨坩埚基底间设置富碳少TaC的过渡层，可有效降低石墨坩埚基底与TaC涂层之间因热膨胀系数差异引起的内应力和微裂纹。
Tantalum carbide coating as well as preparation method and application thereof
一种碳化钽涂层及其制备方法和应用
ZHAI HU (author) / SUN JINMEI (author) / SHI YONGGUI (author)
2024-09-24
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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