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Alumina target as well as preparation method and application thereof
The invention relates to the technical field of powder metallurgy materials, and particularly discloses an aluminum oxide target material and a preparation method and application thereof. The invention discloses a preparation method of an aluminum oxide target material. The preparation method specifically comprises the following steps in sequence: carrying out ball-milling pretreatment on aluminum oxide raw material powder, carrying out cold isostatic pressing, carrying out hot pressing, machining and cleaning to obtain the aluminum oxide target material, the parameter conditions of the cold isostatic pressing are as follows: the pressure is 150-250 MPa, and the time is 5-10 minutes; the parameter conditions of the hot pressing are as follows: the temperature is 1000-1200 DEG C, the pressure is 30-40 MPa, and the heat and pressure preservation time is 1-2 hours. By means of the preparation method of the aluminum oxide target material, the aluminum oxide target material which is excellent in microstructure, high in density and high in purity can be obtained.
本申请涉及粉末冶金材料的技术领域，具体公开了一种氧化铝靶材及其制备方法和应用。本申请公开的氧化铝靶材的制备方法，具体包括依次进行以下步骤：氧化铝原料粉末球磨预处理、冷等静压、热压、机加工、清洗后得到所述氧化铝靶材；所述冷等静压的参数条件为：压力为150‑250MPa，时间为5‑10min，得到氧化铝坯料；所述热压的参数条件为：温度1000‑1200℃，压力30‑40MPa，保温保压时间1‑2h。利用本申请提供的上述氧化铝靶材的制备方法，可以获得微观组织优异、致密度高和纯度高的氧化铝靶材。
Alumina target as well as preparation method and application thereof
The invention relates to the technical field of powder metallurgy materials, and particularly discloses an aluminum oxide target material and a preparation method and application thereof. The invention discloses a preparation method of an aluminum oxide target material. The preparation method specifically comprises the following steps in sequence: carrying out ball-milling pretreatment on aluminum oxide raw material powder, carrying out cold isostatic pressing, carrying out hot pressing, machining and cleaning to obtain the aluminum oxide target material, the parameter conditions of the cold isostatic pressing are as follows: the pressure is 150-250 MPa, and the time is 5-10 minutes; the parameter conditions of the hot pressing are as follows: the temperature is 1000-1200 DEG C, the pressure is 30-40 MPa, and the heat and pressure preservation time is 1-2 hours. By means of the preparation method of the aluminum oxide target material, the aluminum oxide target material which is excellent in microstructure, high in density and high in purity can be obtained.
本申请涉及粉末冶金材料的技术领域，具体公开了一种氧化铝靶材及其制备方法和应用。本申请公开的氧化铝靶材的制备方法，具体包括依次进行以下步骤：氧化铝原料粉末球磨预处理、冷等静压、热压、机加工、清洗后得到所述氧化铝靶材；所述冷等静压的参数条件为：压力为150‑250MPa，时间为5‑10min，得到氧化铝坯料；所述热压的参数条件为：温度1000‑1200℃，压力30‑40MPa，保温保压时间1‑2h。利用本申请提供的上述氧化铝靶材的制备方法，可以获得微观组织优异、致密度高和纯度高的氧化铝靶材。
Alumina target as well as preparation method and application thereof
一种氧化铝靶材及其制备方法和应用
ZHANG FENGGE (author) / SHI ZHENG (author) / ZHANG XUEHUA (author) / WEI TIEFENG (author) / ZHANG QIANNAN (author) / YUE WANXIANG (author) / MENG XIAOTING (author)
2024-10-11
Patent
Electronic Resource
Chinese
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