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Alumina ceramic member, method for manufacturing alumina ceramic member, member for semiconductor manufacturing apparatus, and substrate processing apparatus
This alumina ceramic member contains alumina polycrystals having an average particle diameter of 100 [mu] m or less, in which yttrium in a crystal state of an oxide, a crystal state of a garnet structure, and a state other than an amorphous state is doped in the crystal grain boundaries.
一种氧化铝陶瓷部件，含有平均粒径100μm以下的氧化铝多晶体，所述氧化铝多晶体的晶界中，氧化物的结晶状态、石榴子石结构的结晶状态和非结晶状态以外的状态的钇被掺杂。
Alumina ceramic member, method for manufacturing alumina ceramic member, member for semiconductor manufacturing apparatus, and substrate processing apparatus
This alumina ceramic member contains alumina polycrystals having an average particle diameter of 100 [mu] m or less, in which yttrium in a crystal state of an oxide, a crystal state of a garnet structure, and a state other than an amorphous state is doped in the crystal grain boundaries.
一种氧化铝陶瓷部件，含有平均粒径100μm以下的氧化铝多晶体，所述氧化铝多晶体的晶界中，氧化物的结晶状态、石榴子石结构的结晶状态和非结晶状态以外的状态的钇被掺杂。
Alumina ceramic member, method for manufacturing alumina ceramic member, member for semiconductor manufacturing apparatus, and substrate processing apparatus
氧化铝陶瓷部件、氧化铝陶瓷部件的制造方法、半导体制造装置用部件和基板处理装置
SATO MASANORI (author) / KAWABATA ATSUSHI (author) / KASHIMURA RYUSEI (author) / HIROSE JUN (author) / KATO KUNIHIKO (author) / SHIRAI TAKASHI (author)
2024-10-25
Patent
Electronic Resource
Chinese
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