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The invention discloses aluminum-doped zinc oxide nano-powder and a preparation method and application thereof, the nano-powder is solid powder, the D50 of the nano-powder is 10-30 [mu] m, and the compactness of the nano-powder is 1.2-1.4 g/cm < 3 >. The invention has the beneficial effects that the nano-powder is a solid sphere, the D50 of the nano-powder is 10-30 [mu] m, and the compactness of the nano-powder is 1.2-1.4 g/cm < 3 >. The nano powder body can be sintered to produce a ceramic target material with a more uniform crystal microstructure and a smaller crystal size, and the obtained ceramic target material can realize a stable thick coating film of more than 400 nanometers on a large-size silicon wafer.
本发明公开了一种铝掺杂的氧化锌纳米粉体及其制备方法和应用，所述纳米粉体为实心粉体，所述纳米粉体的D50为10‑30um，所述纳米粉体的密实度为1.2‑1.4g/cm3。本发明的有益效果为：发明所述纳米粉体为实心球体，其D50为10‑30um，密实度为1.2‑1.4g/cm3。所述纳米粉体能通过烧结产生结晶微结构更均匀、晶体尺寸更小的陶瓷靶材，且能使所得陶瓷靶材在大尺寸硅晶圆上实现稳定的400纳米以上厚镀膜。
The invention discloses aluminum-doped zinc oxide nano-powder and a preparation method and application thereof, the nano-powder is solid powder, the D50 of the nano-powder is 10-30 [mu] m, and the compactness of the nano-powder is 1.2-1.4 g/cm < 3 >. The invention has the beneficial effects that the nano-powder is a solid sphere, the D50 of the nano-powder is 10-30 [mu] m, and the compactness of the nano-powder is 1.2-1.4 g/cm < 3 >. The nano powder body can be sintered to produce a ceramic target material with a more uniform crystal microstructure and a smaller crystal size, and the obtained ceramic target material can realize a stable thick coating film of more than 400 nanometers on a large-size silicon wafer.
本发明公开了一种铝掺杂的氧化锌纳米粉体及其制备方法和应用，所述纳米粉体为实心粉体，所述纳米粉体的D50为10‑30um，所述纳米粉体的密实度为1.2‑1.4g/cm3。本发明的有益效果为：发明所述纳米粉体为实心球体，其D50为10‑30um，密实度为1.2‑1.4g/cm3。所述纳米粉体能通过烧结产生结晶微结构更均匀、晶体尺寸更小的陶瓷靶材，且能使所得陶瓷靶材在大尺寸硅晶圆上实现稳定的400纳米以上厚镀膜。
Aluminum-doped zinc oxide nano-powder as well as preparation method and application thereof
一种铝掺杂氧化锌纳米粉体及其制备方法和应用
CHENG LIN (author)
2024-11-08
Patent
Electronic Resource
Chinese
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