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Preparation method of tin antimony oxide ceramic target material
The invention relates to the technical field of sputtering target materials, in particular to a preparation method of a tin antimony oxide ceramic target material. The preparation method comprises the following steps: S1, raw material mixing: uniformly mixing tin oxide powder, antimony oxide powder and an additive to prepare slurry; s2, a ball milling process; s3, a sanding process; s4, performing spray granulation; and S5, compression molding: obtaining an original target biscuit with high density and few defects through precisely controlled compression molding pressure and isostatic pressing holding time, and further improving the uniformity and density of the biscuit through cold isostatic pressing with higher pressure. And S6, degreasing and sintering are conducted, specifically, through pre-degreasing and final sintering, complete curing forming and densification of the target material biscuit are achieved, and meanwhile sintering under the oxygen atmosphere is beneficial to improving the quality and performance of the product. The preparation method of the tin antimony oxide ceramic target material not only has remarkable advantages in technology and economy, but also has excellent performance in the aspects of environmental protection and resource utilization, and an efficient, reliable and sustainable way is provided for production of high-performance target materials.
本申请涉及溅射靶材技术领域，尤其涉及一种氧化锡锑陶瓷靶材的制备方法。制备方法包括以下步骤：S1、混合原料：将氧化锡粉末、氧化锑粉末和添加剂混合均匀，制成浆料；S2、球磨过程；S3、砂磨过程；S4、喷雾造粒；S5、模压成型：通过精确控制的模压成型压力和等静压保持时间，得到密度高、缺陷少的原始靶材素坯，再通过更高压力的冷等静压压制，进一步提高素坯的均匀性和致密度。S6、脱脂和烧结：通过预脱脂和最终烧结，实现了靶材素坯的完全固化成型和致密化，同时在氧气氛围下烧结有助于提升产品的质量和性能。本申请的氧化锡锑陶瓷靶材制备方法不仅在技术和经济上具有显著优势，而且在环境保护和资源利用方面也表现出色，为高性能靶材的生产提供了一种高效、可靠和可持续的途径。
Preparation method of tin antimony oxide ceramic target material
The invention relates to the technical field of sputtering target materials, in particular to a preparation method of a tin antimony oxide ceramic target material. The preparation method comprises the following steps: S1, raw material mixing: uniformly mixing tin oxide powder, antimony oxide powder and an additive to prepare slurry; s2, a ball milling process; s3, a sanding process; s4, performing spray granulation; and S5, compression molding: obtaining an original target biscuit with high density and few defects through precisely controlled compression molding pressure and isostatic pressing holding time, and further improving the uniformity and density of the biscuit through cold isostatic pressing with higher pressure. And S6, degreasing and sintering are conducted, specifically, through pre-degreasing and final sintering, complete curing forming and densification of the target material biscuit are achieved, and meanwhile sintering under the oxygen atmosphere is beneficial to improving the quality and performance of the product. The preparation method of the tin antimony oxide ceramic target material not only has remarkable advantages in technology and economy, but also has excellent performance in the aspects of environmental protection and resource utilization, and an efficient, reliable and sustainable way is provided for production of high-performance target materials.
本申请涉及溅射靶材技术领域，尤其涉及一种氧化锡锑陶瓷靶材的制备方法。制备方法包括以下步骤：S1、混合原料：将氧化锡粉末、氧化锑粉末和添加剂混合均匀，制成浆料；S2、球磨过程；S3、砂磨过程；S4、喷雾造粒；S5、模压成型：通过精确控制的模压成型压力和等静压保持时间，得到密度高、缺陷少的原始靶材素坯，再通过更高压力的冷等静压压制，进一步提高素坯的均匀性和致密度。S6、脱脂和烧结：通过预脱脂和最终烧结，实现了靶材素坯的完全固化成型和致密化，同时在氧气氛围下烧结有助于提升产品的质量和性能。本申请的氧化锡锑陶瓷靶材制备方法不仅在技术和经济上具有显著优势，而且在环境保护和资源利用方面也表现出色，为高性能靶材的生产提供了一种高效、可靠和可持续的途径。
Preparation method of tin antimony oxide ceramic target material
一种氧化锡锑陶瓷靶材的制备方法
WEN YANLING (author)
2024-11-12
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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