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Magnesium fluoride target material and preparation method thereof
The invention belongs to the field of sputtering target material preparation, and discloses a preparation method of a magnesium fluoride target material. Comprising the following steps: pre-pressing a mold filled with magnesium fluoride powder; sequentially carrying out first-stage heating and second-stage heating on the prepressed mold filled with the magnesium fluoride powder under a vacuum condition, wherein the temperature of the first-stage heating is 400-500 DEG C; the temperature of the second-stage heating is 850-930 DEG C, pressurizing is started after the second-stage heating is performed for 5-10 minutes, the pressurizing pressure is 50-60 MPa, and the pressure is released until the second-stage heating is finished; and cooling the mold, taking out the magnesium fluoride target blank, and processing to obtain the magnesium fluoride target. According to the preparation method, two-stage heating is adopted, uniform heating in the preparation process of the target blank can be guaranteed, pressurization is conducted in the second-stage heating process, the density and hardness performance in the preparation process of the target is guaranteed, and the finally prepared target is high in density, high in hardness and stable in quality.
本发明属于溅射靶材制备领域，公开了一种氟化镁靶材的制备方法。包括以下步骤：将装有氟化镁粉末的模具进行预压；预压后的装有氟化镁粉末的模具在真空条件下依次进行一段加热和二段加热：一段加热的温度为400~500℃；二段加热的温度为850~930℃，二段加热5~10min后开始加压，加压压力为50~60MPa，加压至二段加热结束，释放压力；冷却模具，取出氟化镁靶材坯料，加工后得氟化镁靶材。本发明采用两段式升温加热，可以保证靶材坯体制备过程中的受热均匀，在第二段加热过程中进行加压，保证靶材制备过程中的密度和硬度性能，最终制备得到的靶材致密度高，硬度高，质量稳定。
Magnesium fluoride target material and preparation method thereof
The invention belongs to the field of sputtering target material preparation, and discloses a preparation method of a magnesium fluoride target material. Comprising the following steps: pre-pressing a mold filled with magnesium fluoride powder; sequentially carrying out first-stage heating and second-stage heating on the prepressed mold filled with the magnesium fluoride powder under a vacuum condition, wherein the temperature of the first-stage heating is 400-500 DEG C; the temperature of the second-stage heating is 850-930 DEG C, pressurizing is started after the second-stage heating is performed for 5-10 minutes, the pressurizing pressure is 50-60 MPa, and the pressure is released until the second-stage heating is finished; and cooling the mold, taking out the magnesium fluoride target blank, and processing to obtain the magnesium fluoride target. According to the preparation method, two-stage heating is adopted, uniform heating in the preparation process of the target blank can be guaranteed, pressurization is conducted in the second-stage heating process, the density and hardness performance in the preparation process of the target is guaranteed, and the finally prepared target is high in density, high in hardness and stable in quality.
本发明属于溅射靶材制备领域，公开了一种氟化镁靶材的制备方法。包括以下步骤：将装有氟化镁粉末的模具进行预压；预压后的装有氟化镁粉末的模具在真空条件下依次进行一段加热和二段加热：一段加热的温度为400~500℃；二段加热的温度为850~930℃，二段加热5~10min后开始加压，加压压力为50~60MPa，加压至二段加热结束，释放压力；冷却模具，取出氟化镁靶材坯料，加工后得氟化镁靶材。本发明采用两段式升温加热，可以保证靶材坯体制备过程中的受热均匀，在第二段加热过程中进行加压，保证靶材制备过程中的密度和硬度性能，最终制备得到的靶材致密度高，硬度高，质量稳定。
Magnesium fluoride target material and preparation method thereof
一种氟化镁靶材及其制备方法
WEN CHONGBIN (author) / ZHU LIU (author) / TONG PEIYUN (author)
2024-11-15
Patent
Electronic Resource
Chinese
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