A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Bonding agent for bonding aluminum nitride ceramics and bonding method
The invention discloses a bonding agent for bonding aluminum nitride ceramics and a bonding method, and belongs to the technical field of electrostatic chucks, and the bonding agent comprises the following components in parts by weight: 1.5-5.5 wt% of B2O3, 40-55 wt% of CaO, 40-55 wt% of AI2O3, an organic solvent, a dispersant and a binder. The bonding method comprises the steps that a first aluminum nitride sintered body and a second aluminum nitride sintered body which are bonded are prepared, the bonding face of the first aluminum nitride sintered body and the bonding face of the second aluminum nitride sintered body need to be machined firstly, alcohol serves as a cleaning agent, and ultrasonic cleaning is conducted for 30 min or above; the preparation method comprises the following steps: respectively weighing B2O3, CaO and AI2O3 according to a ratio, putting the weighed B2O3, CaO and AI2O3 together with an organic solvent, a dispersant and a binder into a ball milling tank, and carrying out ball milling for 4-6 hours to form a binding agent; the bonding agent is uniformly coated on the bonding surface of the first aluminum nitride sintered body and the second aluminum nitride sintered body, the thickness of the bonding agent is 90-110 [mu] m, bonding is carried out, the load of 10 kg/cm < 2 > is applied, nitrogen is filled at the temperature of 1200 DEG C for atmosphere protection, the bonding temperature is 1400-1800 DEG C, and the bonding time is 20-50 min.
本发明公开了一种用于接合氮化铝陶瓷的接合剂及接合方法，属于静电卡盘技术领域，所述接合剂按照重量份数计算包括：1.5～5.5wt％的B2O3、40～55wt％的CaO、40～55wt％的AI2O3，以及有机溶剂、分散剂和粘结剂。接合方法包括：准备接合的第一氮化铝烧结体和第二氮化铝烧结体，第一氮化铝烧结体、第二氮化铝烧结体的接合面需先进行加工，用酒精作为清洗剂，放入超声波清洗30min以上；B2O3、CaO、AI2O3按照比例分别进行称重，并与有机溶剂、分散剂、粘结剂一并放入球磨罐中进行球磨4～6h，形成接合剂；接合剂均匀涂在第一氮化铝烧结体和第二氮化铝烧结体的接合面，厚度为90～110μm，进行接合，并施加10kg/cm2的负重，在1200℃充入氮气进行气氛保护，接合温度1400～1800℃，接合时间为20～50min。
Bonding agent for bonding aluminum nitride ceramics and bonding method
The invention discloses a bonding agent for bonding aluminum nitride ceramics and a bonding method, and belongs to the technical field of electrostatic chucks, and the bonding agent comprises the following components in parts by weight: 1.5-5.5 wt% of B2O3, 40-55 wt% of CaO, 40-55 wt% of AI2O3, an organic solvent, a dispersant and a binder. The bonding method comprises the steps that a first aluminum nitride sintered body and a second aluminum nitride sintered body which are bonded are prepared, the bonding face of the first aluminum nitride sintered body and the bonding face of the second aluminum nitride sintered body need to be machined firstly, alcohol serves as a cleaning agent, and ultrasonic cleaning is conducted for 30 min or above; the preparation method comprises the following steps: respectively weighing B2O3, CaO and AI2O3 according to a ratio, putting the weighed B2O3, CaO and AI2O3 together with an organic solvent, a dispersant and a binder into a ball milling tank, and carrying out ball milling for 4-6 hours to form a binding agent; the bonding agent is uniformly coated on the bonding surface of the first aluminum nitride sintered body and the second aluminum nitride sintered body, the thickness of the bonding agent is 90-110 [mu] m, bonding is carried out, the load of 10 kg/cm < 2 > is applied, nitrogen is filled at the temperature of 1200 DEG C for atmosphere protection, the bonding temperature is 1400-1800 DEG C, and the bonding time is 20-50 min.
本发明公开了一种用于接合氮化铝陶瓷的接合剂及接合方法，属于静电卡盘技术领域，所述接合剂按照重量份数计算包括：1.5～5.5wt％的B2O3、40～55wt％的CaO、40～55wt％的AI2O3，以及有机溶剂、分散剂和粘结剂。接合方法包括：准备接合的第一氮化铝烧结体和第二氮化铝烧结体，第一氮化铝烧结体、第二氮化铝烧结体的接合面需先进行加工，用酒精作为清洗剂，放入超声波清洗30min以上；B2O3、CaO、AI2O3按照比例分别进行称重，并与有机溶剂、分散剂、粘结剂一并放入球磨罐中进行球磨4～6h，形成接合剂；接合剂均匀涂在第一氮化铝烧结体和第二氮化铝烧结体的接合面，厚度为90～110μm，进行接合，并施加10kg/cm2的负重，在1200℃充入氮气进行气氛保护，接合温度1400～1800℃，接合时间为20～50min。
Bonding agent for bonding aluminum nitride ceramics and bonding method
一种用于接合氮化铝陶瓷的接合剂及接合方法
HUANG SHAOHUA (author) / LI JUN (author) / SHI ZHEYUAN (author) / XIAO WEI (author) / ZHANG WEIJUN (author) / XI HONGHUI (author)
2025-01-03
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
Direct bonding of copper to aluminum nitride
| British Library Online Contents | 1996
Bonding agent, stemming including bonding agent and preparation method of stemming
| European Patent Office | 2015