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COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FERROELECTRIC THIN FILM FORMATION, AND FERROELECTRIC THIN FILM FORMED BY THE METHOD
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (Pb x La y )(Zr z Ti (1-z) )O 3 [wherein 0.9 < x < 1.3, 0 ¤y < 0.1, and 0 ¤z < 0.9 are satisfied] with a composite oxide (B). The composite oxide (B) includes one or more elements selected from the group consisting of Si and Bi.
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FERROELECTRIC THIN FILM FORMATION, AND FERROELECTRIC THIN FILM FORMED BY THE METHOD
Disclosed is a composition for ferroelectric thin film formation which is used in the formation of a ferroelectric thin film of one material selected from the group consisting of PLZT, PZT, and PT. The composition for ferroelectric thin film formation is a liquid composition for the formation of a thin film of a mixed composite metal oxide formed of a mixture of a composite metal oxide (A) represented by general formula (1): (Pb x La y )(Zr z Ti (1-z) )O 3 [wherein 0.9 < x < 1.3, 0 ¤y < 0.1, and 0 ¤z < 0.9 are satisfied] with a composite oxide (B). The composite oxide (B) includes one or more elements selected from the group consisting of Si and Bi.
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FERROELECTRIC THIN FILM FORMATION, AND FERROELECTRIC THIN FILM FORMED BY THE METHOD
ZUSAMMENSETZUNG ZUR BILDUNG EINER FERROELEKTRISCHEN DÜNNSCHICHT, VERFAHREN ZUR BILDUNG EINER FERROELEKTRISCHEN DÜNNSCHICHT UND ANHAND DES VERFAHRENS GEBILDETE FERROELEKTRISCHE DÜNNSCHICHT
COMPOSITION DESTINÉE À LA FORMATION D'UN FILM FERROÉLECTRIQUE MINCE, PROCÉDÉ DE FORMATION D'UN FILM FERROÉLECTRIQUE MINCE ET FILM FERROLÉLECTRIQUE MINCE FORMÉ SELON CE PROCÉDÉ
FUJII JUN (author) / SAKURAI HIDEAKI (author) / NOGUCHI TAKASHI (author) / SOYAMA NOBUYUKI (author)
2017-07-05
Patent
Electronic Resource
English
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Composition for ferroelectric thin film formation and method for forming ferroelectric thin film
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