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Liquid ejection head, liquid ejection device, and piezoelectric element
A liquid ejection head (I) including a piezoelectric element (300) having a piezoelectric layer (70) and electrodes (80) provided on the piezoelectric layer. The piezoelectric layer is 3 µm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane.
Liquid ejection head, liquid ejection device, and piezoelectric element
A liquid ejection head (I) including a piezoelectric element (300) having a piezoelectric layer (70) and electrodes (80) provided on the piezoelectric layer. The piezoelectric layer is 3 µm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane.
Liquid ejection head, liquid ejection device, and piezoelectric element
Flüssigkeitsausgabekopf, Flüssigkeitsausgabevorrichtung und piezoelektrisches Element
Tête d'éjection de liquide, appareil d'éjection de liquide et élément piézoélectrique
HAMADA YASUAKI (author)
2016-05-11
Patent
Electronic Resource
English
Piezoelectric element, liquid ejection head, and liquid ejection device
| European Patent Office | 2015
| European Patent Office | 2016
| European Patent Office | 2022