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Piezoelectric element, liquid ejection head, and liquid ejection device
A piezoelectric element having a piezoelectric layer and electrodes. The piezoelectric layer is 3 μm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane. A full width at half maximum of the X-ray diffraction peak attributed to the (110) plane is 0.24° or more and 0.28° or less.
Piezoelectric element, liquid ejection head, and liquid ejection device
A piezoelectric element having a piezoelectric layer and electrodes. The piezoelectric layer is 3 μm or less in thickness. The piezoelectric layer is made of a piezoelectric material containing a perovskite compound including bismuth manganate ferrate and barium titanate. The piezoelectric layer is preferentially oriented with the (110) plane. A full width at half maximum of the X-ray diffraction peak attributed to the (110) plane is 0.24° or more and 0.28° or less.
Piezoelectric element, liquid ejection head, and liquid ejection device
HAMADA YASUAKI (author)
2015-09-29
Patent
Electronic Resource
English
Liquid ejection head, liquid ejection device, and piezoelectric element
| European Patent Office | 2016
| European Patent Office | 2016
| European Patent Office | 2022