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    PRODUCTION METHOD FOR C12A7 ELECTRIDE THIN FILM, AND C12A7 ELECTRIDE THIN FILM

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    A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under a low-oxygen-partial-pressure atmosphere using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10 18 cm -3 to 2.3×10 21 cm -3 .

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    PRODUCTION METHOD FOR C12A7 ELECTRIDE THIN FILM, AND C12A7 ELECTRIDE THIN FILM

    New search for: HOSONO HIDEO
    New search for: TODA YOSHITAKE
    New search for: HAYASHI KATSURO
    New search for: ITO SETSURO
    New search for: WATANABE SATORU
    New search for: MIYAKAWA NAOMICHI
    New search for: WATANABE TOSHINARI
    New search for: ITO KAZUHIRO

    A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under a low-oxygen-partial-pressure atmosphere using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10 18 cm -3 to 2.3×10 21 cm -3 .

    Access

    Download

    PRODUCTION METHOD FOR C12A7 ELECTRIDE THIN FILM, AND C12A7 ELECTRIDE THIN FILM

    New search for: HOSONO HIDEO
    New search for: TODA YOSHITAKE
    New search for: HAYASHI KATSURO
    New search for: ITO SETSURO
    New search for: WATANABE SATORU
    New search for: MIYAKAWA NAOMICHI
    New search for: WATANABE TOSHINARI
    New search for: ITO KAZUHIRO

    A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under a low-oxygen-partial-pressure atmosphere using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10 18 cm -3 to 2.3×10 21 cm -3 .

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    Title:

    PRODUCTION METHOD FOR C12A7 ELECTRIDE THIN FILM, AND C12A7 ELECTRIDE THIN FILM

    Additional title:

    HERSTELLUNGSVERFAHREN FÜR EINE C12A7-ELEKTRID-DÜNNSCHICHT UND C12A7-ELEKTRID-DÜNNSCHICHT
    PROCÉDÉ DE PRODUCTION DE COUCHE MINCE D'ÉLECTRURE C12A7 ET COUCHE MINCE D'ÉLECTRURE C12A7

    Contributors:

    HOSONO HIDEO (author) / TODA YOSHITAKE (author) / HAYASHI KATSURO (author) / ITO SETSURO (author) / WATANABE SATORU (author) / MIYAKAWA NAOMICHI (author) / WATANABE TOSHINARI (author) / ITO KAZUHIRO (author)

    Publication date:

    2021-08-11

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C04B Kalk , LIME / H01B CABLES , Kabel / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / H05B ELECTRIC HEATING , Elektrische Heizung

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