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MN-DOPED PZT-BASED PIEZOELECTRIC FILM FORMATION COMPOSITION AND MN-DOPED PZT-BASED PIEZOELECTRIC FILM
A composition for forming a PZT-based piezoelectric film formed of Mn-doped composite metal oxides is provided, the composition including: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone, in which when a metal atom ratio in the composition is shown as Pb:Mn:Zr:Ti, the PZT-based precursors are contained so that a metal atom ratio of Pb is satisfied to be from 1.00 to 1.20, a metal atom ratio of Mn is satisfied to be equal to or greater than 0.002 and less than 0.05, a metal atom ratio of Zr is satisfied to be from 0.40 to 0.55, a metal atom ratio of Ti is satisfied to be from 0.45 to 0.60, and the total of Zr and Ti in a metal atom ratio is 1.
MN-DOPED PZT-BASED PIEZOELECTRIC FILM FORMATION COMPOSITION AND MN-DOPED PZT-BASED PIEZOELECTRIC FILM
A composition for forming a PZT-based piezoelectric film formed of Mn-doped composite metal oxides is provided, the composition including: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone, in which when a metal atom ratio in the composition is shown as Pb:Mn:Zr:Ti, the PZT-based precursors are contained so that a metal atom ratio of Pb is satisfied to be from 1.00 to 1.20, a metal atom ratio of Mn is satisfied to be equal to or greater than 0.002 and less than 0.05, a metal atom ratio of Zr is satisfied to be from 0.40 to 0.55, a metal atom ratio of Ti is satisfied to be from 0.45 to 0.60, and the total of Zr and Ti in a metal atom ratio is 1.
MN-DOPED PZT-BASED PIEZOELECTRIC FILM FORMATION COMPOSITION AND MN-DOPED PZT-BASED PIEZOELECTRIC FILM
ZUSAMMENSETZUNG ZUR BILDUNG VON MN-DOTIERTER, PZT-BASIERTER PIEZOELEKTRISCHER FOLIE UND MN-DOTIERTE, PZT-BASIERTE PIEZOELEKTRISCHE FOLIE
COMPOSITION DE FORMATION DE FILM PIÉZOÉLECTRIQUE DOPÉ AU MN À BASE DE PZT ET FILM PIÉZOÉLECTRIQUE DOPÉ AU MN À BASE DE PZT
DOI TOSHIHIRO (author) / SAKURAI HIDEAKI (author) / SOYAMA NOBUYUKI (author)
2022-04-27
Patent
Electronic Resource
English
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