A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
VERFAHREN ZUR HERSTELLUNG EINER TRÄGERPLATTE UND TRÄGERPLATTE
The invention relates to a carrier base (13) and a method for manufacturing a carrier base, more particularly for the lifting and handling of semiconductor products, wafers or similar, wherein woven fibre layers formed from carbon fibre are arranged to form a stack, wherein the woven fibre layers are impregnated with a resin and the resin is cured and pyrolysed, the stack is then graphitised, wherein a first woven fibre layer of the stack is formed from a first woven fibre comprising filament yarns equal to or thicker than 12 K and a second woven fibre layer of the stack is formed from a second woven fibre comprising filament yarns equal to or finer than 6 K.
VERFAHREN ZUR HERSTELLUNG EINER TRÄGERPLATTE UND TRÄGERPLATTE
The invention relates to a carrier base (13) and a method for manufacturing a carrier base, more particularly for the lifting and handling of semiconductor products, wafers or similar, wherein woven fibre layers formed from carbon fibre are arranged to form a stack, wherein the woven fibre layers are impregnated with a resin and the resin is cured and pyrolysed, the stack is then graphitised, wherein a first woven fibre layer of the stack is formed from a first woven fibre comprising filament yarns equal to or thicker than 12 K and a second woven fibre layer of the stack is formed from a second woven fibre comprising filament yarns equal to or finer than 6 K.
VERFAHREN ZUR HERSTELLUNG EINER TRÄGERPLATTE UND TRÄGERPLATTE
METHOD TO MAKE A SUBSTRATE AND SUBSTRATE
METHODE DE FABRICATION D'UN SUBSTART ET SUBSTRAT
VOLLMER ANDREAS (author) / SCHNEIDER MARTIN (author)
2023-08-30
Patent
Electronic Resource
German
IPC:
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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