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ALUMINUM NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCING SAME
The present invention relates to an aluminum nitride sintered compact containing aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and an aluminum element, wherein a median diameter of the aluminum nitride crystal grains is 2 µm or less; 10 to 200 intergrain voids having a longest diameter of 0.2 to 1 µm are dispersed in a region of a cross section of 100 µm in square; and the carbon atom content is less than 0.10% by mass.
ALUMINUM NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCING SAME
The present invention relates to an aluminum nitride sintered compact containing aluminum nitride crystal grains and composite oxide crystal grains containing a rare earth element and an aluminum element, wherein a median diameter of the aluminum nitride crystal grains is 2 µm or less; 10 to 200 intergrain voids having a longest diameter of 0.2 to 1 µm are dispersed in a region of a cross section of 100 µm in square; and the carbon atom content is less than 0.10% by mass.
ALUMINUM NITRIDE SINTERED COMPACT AND METHOD FOR PRODUCING SAME
ALUMINIUMNITRID-SINTERKÖRPER UND HERSTELLUNGSVERFAHREN DAFÜR
PIÈCE COMPACTE FRITTÉE DE NITRURE D'ALUMINIUM ET SON PROCÉDÉ DE PRODUCTION
MIYAMOTO DAISUKE (author) / SHIOI KOSUKE (author)
2020-06-03
Patent
Electronic Resource
English
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