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A platform for research: civil engineering, architecture and urbanism
SYNTHESIS OF HEXAGONAL BORON NITRIDE FILMS AND TRANSFER METHOD
A method of producing hexagonal boron nitride by chemical vapour deposition on a substrate, the method comprising: (a) a step of heating the substrate at a first temperature for a first time; (b) a step of exposing the substrate to a precursor containing boron and a precursor containing nitrogen at a first partial pressure of the precursor(s) at a second temperature for a second time, wherein either a single precursor is used as the precursor containing boron and as the precursor containing nitrogen or different precursors are used as the precursor containing boron and the precursor containing nitrogen; (c) a step of heating the substrate at a third temperature for a third time without the precursor; and (d) a step of exposing the substrate to the precursors at a fourth temperature at a second partial pressure of the precursor(s) for a fourth time.
SYNTHESIS OF HEXAGONAL BORON NITRIDE FILMS AND TRANSFER METHOD
A method of producing hexagonal boron nitride by chemical vapour deposition on a substrate, the method comprising: (a) a step of heating the substrate at a first temperature for a first time; (b) a step of exposing the substrate to a precursor containing boron and a precursor containing nitrogen at a first partial pressure of the precursor(s) at a second temperature for a second time, wherein either a single precursor is used as the precursor containing boron and as the precursor containing nitrogen or different precursors are used as the precursor containing boron and the precursor containing nitrogen; (c) a step of heating the substrate at a third temperature for a third time without the precursor; and (d) a step of exposing the substrate to the precursors at a fourth temperature at a second partial pressure of the precursor(s) for a fourth time.
SYNTHESIS OF HEXAGONAL BORON NITRIDE FILMS AND TRANSFER METHOD
SYNTHESE VON HEXAGONALEN BORNITRIDSCHICHTEN UND ÜBERTRAGUNGSVERFAHREN
SYNTHÈSE DE FILMS DE NITRURE DE BORE HEXAGONAL ET PROCÉDÉ DE TRANSFERT
WANG RUIZHI (author) / HOFMANN STEPHAN (author)
2021-03-24
Patent
Electronic Resource
English
IPC:
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C08K
Verwendung von anorganischen oder nichtmakromolekularen organischen Stoffen als Zusatzstoffe
,
USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES AS COMPOUNDING INGREDIENTS
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
SYNTHESIS OF HEXAGONAL BORON NITRIDE FILMS AND TRANSFER METHOD
| European Patent Office | 2021
SYNTHESIS OF HEXAGONAL BORON NITRIDE FILMS AND TRANSFER METHOD
| European Patent Office | 2019