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BRAZING PROCESSES FOR JOINING CERAMICS AND METALS, AND SEMICONDUCTOR PROCESSING AND INDUSTRIAL EQUIPMENT USING SAME
A joining method includes placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly and placing the components of said joining pre-assembly into a process chamber. Oxygen is removed from said process chamber and at least said brazing element of said joining pre-assembly is heated, thereby hermetically joining said first ceramic piece to said second ceramic piece. Said brazing element consists of Cobalt and Carbon.
BRAZING PROCESSES FOR JOINING CERAMICS AND METALS, AND SEMICONDUCTOR PROCESSING AND INDUSTRIAL EQUIPMENT USING SAME
A joining method includes placing a brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly and placing the components of said joining pre-assembly into a process chamber. Oxygen is removed from said process chamber and at least said brazing element of said joining pre-assembly is heated, thereby hermetically joining said first ceramic piece to said second ceramic piece. Said brazing element consists of Cobalt and Carbon.
BRAZING PROCESSES FOR JOINING CERAMICS AND METALS, AND SEMICONDUCTOR PROCESSING AND INDUSTRIAL EQUIPMENT USING SAME
LÖTVERFAHREN ZUM VERBINDEN VON KERAMIK UND METALLEN, UND DIESE VERWENDENDE HALBLEITERVERARBEITUNGS- UND INDUSTRIEANLAGE
PROCÉDÉS DE BRASAGE DESTINÉS À ASSEMBLER DES CÉRAMIQUES ET DES MÉTAUX, ET TRAITEMENT DE SEMI-CONDUCTEURS ET ÉQUIPEMENT INDUSTRIEL METTANT EN OEUVRE CES DERNIERS
ELLIOT ALFRED GRANT (author) / ELLIOT BRENT D A (author)
2022-05-11
Patent
Electronic Resource
English
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