CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE: Fid-Bau Portal

CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE

UMEDA YUJI / OOGAMI JYUNJI

In the ceramic sintered body (3), the Zr content is 17.5 mass% or more and 23.5 mass% or less in terms of ZrO₂, the Hf content is 0.3 mass% or more and 0.5 mass% or less in terms of HfO₂, the Al content is 74.3 mass% or more and 80.9 mass% or less in terms of Al₂O₃, the Y content is 0.8 mass% or more and 1.9 mass% or less in terms of Y₂O₃, the Mg content is 0.1 mass% or more and 0.8 mass% or less in terms of MgO, the Si content is 0.1 mass% or more and 1.5 mass% or less in terms of SiO₂, the Ca content is 0.03 mass% or more and 0.35 mass% or less in terms of CaO. The total content of Na and K is 0.01 mass% or more and 0.10 mass% or less, when the K content is converted to K₂O and the Na content converted to Na₂O. The balance content is 0.05 mass% or less in terms of oxide. The sum of the Mg content in terms of MgO, the Si content in terms of SiO₂, the Ca content in terms of CaO, the Na content in terms of Na₂O, the K content in terms of K₂O and the balance content is 0.3 mass% or more and 2.0 mass% or less.