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    YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

    Described herein is a plasma resistant protective coating composition and bulk composition that provides enhanced erosion and corrosion resistance upon the coating composition's or the bulk composition's exposure to harsh chemical environment (such as hydrogen based and/or halogen based chemistries) and/or upon the coating composition's or the bulk composition's exposure to high energy plasma. Also described herein is a method of coating an article with a plasma resistant protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits a reduced number of yttrium based particles.

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    YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

    Described herein is a plasma resistant protective coating composition and bulk composition that provides enhanced erosion and corrosion resistance upon the coating composition's or the bulk composition's exposure to harsh chemical environment (such as hydrogen based and/or halogen based chemistries) and/or upon the coating composition's or the bulk composition's exposure to high energy plasma. Also described herein is a method of coating an article with a plasma resistant protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits a reduced number of yttrium based particles.

    Access

    Download

    YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

    Described herein is a plasma resistant protective coating composition and bulk composition that provides enhanced erosion and corrosion resistance upon the coating composition's or the bulk composition's exposure to harsh chemical environment (such as hydrogen based and/or halogen based chemistries) and/or upon the coating composition's or the bulk composition's exposure to high energy plasma. Also described herein is a method of coating an article with a plasma resistant protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits a reduced number of yttrium based particles.

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    Title:

    YTTRIUM OXIDE BASED COATING AND BULK COMPOSITIONS

    Additional title:

    YTTRIUMOXIDBASIERTE BESCHICHTUNG UND MASSENZUSAMMENSETZUNGEN
    COMPOSITION DE BASE ET COMPOSITION DE REVÊTEMENT À BASE D'OXYDE D'YTTRIUM

    Contributors:

    BEAUDRY CHRISTOPHER LAURENT (author) / FIROUZDOR VAHID (author) / SOMMERS JOSEPH FREDERICK (author) / WILANTEWICZ TREVOR EDWARD (author) / DOH HYUN-HO (author) / BEHNKE JOSEPH FREDERICK (author)

    Publication date:

    2025-01-22

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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